{"id":107,"date":"2026-10-01T10:10:00","date_gmt":"2026-10-01T02:10:00","guid":{"rendered":"https:\/\/zkmsemi.com\/?p=107"},"modified":"2026-10-12T20:57:38","modified_gmt":"2026-10-12T12:57:38","slug":"c10-post-cmp-cleaning-yield-2026","status":"publish","type":"post","link":"https:\/\/zkmsemi.com\/?p=107","title":{"rendered":"CMP\u540e\u6e05\u6d17\u7684\u826f\u7387\u653b\u9632\uff1a\u7eb3\u7c73\u9897\u7c92\u53bb\u9664\u4e0e\u65cb\u8f6c\u5e72\u71e5SRD\u914d\u5408"},"content":{"rendered":"<p>\u5316\u5b66\u673a\u68b0\u629b\u5149\uff08CMP\uff09\u662f\u6676\u5706\u5e73\u5766\u5316\u7684\u5173\u952e\u5de5\u5e8f\uff0c\u800cCMP\u4e4b\u540e\u82e5\u6e05\u6d17\u4e0d\u5230\u4f4d\uff0c\u629b\u5149\u6db2\u4e2d\u7684\u7eb3\u7c73\u9897\u7c92\u3001\u78e8\u6599\u6b8b\u7559\u4e0e\u91d1\u5c5e\u79bb\u5b50\u5c31\u4f1a\u6210\u4e3a\u826f\u7387\u7684\u9690\u5f62\u6740\u624b\u3002CMP\u540e\u6e05\u6d17\uff08Post-CMP Cleaning\uff09\u56e0\u6b64\u88ab\u89c6\u4e3a&#8221;\u826f\u7387\u7684\u6700\u540e\u4e00\u9053\u9632\u7ebf&#8221;\uff0c\u5176\u4e2d\u7eb3\u7c73\u9897\u7c92\u53bb\u9664\u4e0e\u65cb\u8f6c\u51b2\u6d17\u5e72\u71e5\uff08SRD\uff09\u7684\u914d\u5408\u5c24\u4e3a\u5173\u952e\uff0c\u76f4\u63a5\u51b3\u5b9a\u4e86\u629b\u5149\u540e\u7684\u6676\u5706\u80fd\u5426\u987a\u5229\u8fdb\u5165\u4e0b\u4e00\u9053\u5de5\u5e8f\u3002<\/p>\n<p><img decoding=\"async\" src=\"https:\/\/zkmsemi.com\/wp-content\/uploads\/2026\/10\/a107.jpg\" alt=\"\u534a\u5bfc\u4f53\u6676\u5706\u7acb\u5f0f\u5355\u53cc\u8154\u65cb\u8f6c\u7529\u5e72\u5e72\u71e5\u8bbe\u5907\"><\/p>\n<p><strong>\u4e00\u3001CMP\u540e\u4e3a\u4f55\u6700\u96be\u6e05\u6d17<\/strong><\/p>\n<p>CMP\u8fc7\u7a0b\u4e2d\uff0c\u629b\u5149\u6db2\uff08slurry\uff09\u542b\u6709\u5927\u91cf\u7eb3\u7c73\u7ea7\u4e8c\u6c27\u5316\u7845\u6216\u6c27\u5316\u94dd\u78e8\u6599\u9897\u7c92\uff0c\u5728\u673a\u68b0\u4e0e\u5316\u5b66\u5171\u540c\u4f5c\u7528\u4e0b\uff0c\u8fd9\u4e9b\u9897\u7c92\u88ab\u538b\u5165\u6676\u5706\u8868\u9762\u53ca\u56fe\u5f62\u7f1d\u9699\uff0c\u5e76\u4e0e\u8868\u9762\u5f62\u6210\u8f83\u5f3a\u7684\u5438\u9644\u529b\u3002\u52a0\u4e4bCMP\u540e\u6676\u5706\u8868\u9762\u901a\u5e38\u5904\u4e8e\u7279\u5b9a\u7684\u4eb2\u6c34\u6216\u758f\u6c34\u72b6\u6001\uff0c\u9897\u7c92\u53bb\u9664\u96be\u5ea6\u8fdc\u9ad8\u4e8e\u5e38\u89c4\u6e05\u6d17\u3002\u4e00\u65e6\u6b8b\u7559\uff0c\u5c06\u76f4\u63a5\u5f71\u54cd\u540e\u7eed\u5149\u523b\u4e0e\u6c89\u79ef\u7684\u8d28\u91cf\uff0c\u751a\u81f3\u9020\u6210\u6574\u7247\u6676\u5706\u62a5\u5e9f\u3002<\/p>\n<p><strong>\u4e8c\u3001\u7eb3\u7c73\u9897\u7c92\u7684\u53bb\u9664\u624b\u6bb5<\/strong><\/p>\n<p>Post-CMP\u6e05\u6d17\u901a\u5e38\u91c7\u7528\u5316\u5b66\u6e05\u6d17\u4e0e\u7269\u7406\u6e05\u6d17\u76f8\u7ed3\u5408\u7684\u65b9\u5f0f\uff1a\u4ee5\u7279\u5b9a\u914d\u6bd4\u7684\u9178\u6027\u6216\u78b1\u6027\u836f\u6db2\u6eb6\u89e3\u5e76\u7edc\u5408\u91d1\u5c5e\u79bb\u5b50\u4e0e\u9897\u7c92\uff0c\u518d\u914d\u5408\u5146\u58f0\u6ce2\u3001\u5237\u6d17\uff08PVA\u5237\uff09\u3001\u4e8c\u6d41\u4f53\u55b7\u6dcb\u7b49\u7269\u7406\u624b\u6bb5\uff0c\u5c06\u7eb3\u7c73\u9897\u7c92\u4ece\u8868\u9762\u5265\u79bb\uff0c\u6700\u540e\u4ee5\u8d85\u7eaf\u6c34\u5f7b\u5e95\u6f02\u6d17\u3002\u6574\u4e2a\u8fc7\u7a0b\u9700\u8981\u7cbe\u51c6\u63a7\u5236\u836f\u6db2\u6d53\u5ea6\u3001\u6e29\u5ea6\u4e0e\u673a\u68b0\u4f5c\u7528\u5f3a\u5ea6\uff0c\u65e2\u8981\u53bb\u51c0\u9897\u7c92\uff0c\u53c8\u4e0d\u80fd\u8150\u8680\u8868\u9762\u6216\u635f\u4f24\u4f4ek\u4ecb\u8d28\u3002\u4e0d\u540cCMP\u5c42\uff08\u5982\u6c27\u5316\u7845\u3001\u94dc\u3001\u94a8\uff09\u5f80\u5f80\u9700\u8981\u5dee\u5f02\u5316\u7684\u6e05\u6d17\u914d\u65b9\u3002<\/p>\n<p><strong>\u4e09\u3001SRD\u5e72\u71e5\u7684\u826f\u7387\u5b88\u62a4<\/strong><\/p>\n<p>\u6e05\u6d17\u6f02\u6d17\u4e4b\u540e\uff0c\u6676\u5706\u8868\u9762\u8986\u6709\u4e00\u5c42\u8d85\u7eaf\u6c34\u819c\u3002\u82e5\u76f4\u63a5\u66b4\u9732\u5e72\u71e5\uff0c\u6c34\u819c\u84b8\u53d1\u4f1a\u91cd\u65b0\u5f15\u5165\u6c34\u75d5\u4e0e\u9897\u7c92\u3002\u65cb\u8f6c\u51b2\u6d17\u5e72\u71e5\u8bbe\u5907\uff08SRD\uff09\u901a\u8fc7\u9ad8\u901f\u65cb\u8f6c\u7529\u9664\u6c34\u5206\uff0c\u5e76\u5728\u65cb\u8f6c\u540c\u65f6\u6216\u4e4b\u540e\u901a\u5165\u70ed\u6c2e\u6c14\u5b8c\u6210\u7cbe\u5e72\u71e5\uff0c\u4f7f\u6676\u5706\u5728\u60f0\u6027\u3001\u6d01\u51c0\u7684\u6c14\u6d41\u4e2d\u8fc5\u901f\u8131\u6c34\uff0c\u907f\u514d\u4e8c\u6b21\u6c61\u67d3\u3002&#8221;\u6e05\u6d17\u53bb\u9897\u7c92\u2014\u8d85\u7eaf\u6c34\u6f02\u6d17\u2014SRD\u65cb\u8f6c\u5e72\u71e5&#8221;\u7531\u6b64\u6784\u6210CMP\u540e\u826f\u7387\u5b88\u62a4\u7684\u6807\u51c6\u95ed\u73af\u3002<\/p>\n<p><strong>\u56db\u3001CMP\u540e\u6e05\u6d17\u7684\u5de5\u827a\u96be\u70b9<\/strong><\/p>\n<p>Post-CMP\u6e05\u6d17\u7684\u96be\u70b9\u5728\u4e8e&#8221;\u65e2\u8981\u53bb\u51c0\uff0c\u53c8\u4e0d\u80fd\u8fc7\u5ea6\u8150\u8680&#8221;\u3002\u4e0d\u540cCMP\u5c42\u9762\u5bf9\u6e05\u6d17\u7684\u8981\u6c42\u5dee\u5f02\u5f88\u5927\uff1a\u94dcCMP\u9700\u8981\u5728\u53bb\u9664\u78e8\u6599\u9897\u7c92\u7684\u540c\u65f6\u6291\u5236\u94dc\u7684\u6c27\u5316\u4e0e\u8150\u8680\uff1b\u6c27\u5316\u7845CMP\u5219\u66f4\u5173\u6ce8\u7eb3\u7c73\u9897\u7c92\u7684\u5f7b\u5e95\u53bb\u9664\uff1b\u800c\u4f4ek\u4ecb\u8d28\u6750\u6599\u5bf9\u673a\u68b0\u4f5c\u7528\u5f3a\u5ea6\u6781\u5176\u654f\u611f\uff0c\u8fc7\u5f3a\u7684\u5237\u6d17\u6216\u5146\u58f0\u6ce2\u90fd\u53ef\u80fd\u9020\u6210\u4ecb\u8d28\u635f\u4f24\u3002\u56e0\u6b64\uff0cPost-CMP\u6e05\u6d17\u8bbe\u5907\u5f80\u5f80\u9700\u8981\u5177\u5907\u6781\u5f3a\u7684\u5de5\u827a\u53ef\u8c03\u6027\uff0c\u80fd\u591f\u9488\u5bf9\u4e0d\u540c\u6750\u6599\u5c42\u5207\u6362\u836f\u6db2\u914d\u65b9\u3001\u673a\u68b0\u5f3a\u5ea6\u4e0e\u5e72\u71e5\u53c2\u6570\u3002\u8fd9\u79cd\u7075\u6d3b\u6027\uff0c\u6b63\u662f\u8861\u91cfCMP\u540e\u6e05\u6d17\u8bbe\u5907\u662f\u5426&#8221;\u597d\u7528&#8221;\u7684\u5173\u952e\u3002<\/p>\n<p>\u4ece\u6750\u6599\u517c\u5bb9\u6027\u770b\uff0c\u94dc\u4e92\u8fde\u3001\u94b4\u4e92\u8fde\u4ee5\u53ca\u94a8\u6813\u585e\u7b49\u4e0d\u540c\u6750\u6599\u4f53\u7cfb\u5bf9\u540eCMP\u6e05\u6d17\u6db2\u7684pH\u503c\u4e0e\u6c27\u5316\u8fd8\u539f\u52bf\u8981\u6c42\u5dee\u5f02\u663e\u8457\u3002\u636e\u6e05\u534e\u5927\u5b66\u76f8\u5173\u7814\u7a76\u53ca\u7535\u5b50\u5de5\u7a0b\u4e13\u8f912025\u5e7412\u6708\u62a5\u9053\uff0c7nm\u4ee5\u4e0b\u8282\u70b9\u6b8b\u7559SiO2\u7eb3\u7c73\u9897\u7c92\u82e5\u672a\u5f7b\u5e95\u6e05\u9664\uff0c\u5c06\u5f15\u8d77\u7535\u8def\u77ed\u8def\uff1b\u8bbe\u5907\u5382\u5546\u901a\u5e38\u901a\u8fc7SC-1\u4f4e\u6d53\u5ea6\u914d\u6bd4\u3001\u5146\u58f0\u8f85\u52a9\u4e0ePVA\u5237\u7ec4\u5408\uff0c\u5728\u53bb\u9664\u9897\u7c92\u7684\u540c\u65f6\u63a7\u5236\u94dc\u3001\u94b4\u8868\u9762\u8150\u8680\u901f\u7387\u5728\u53ef\u63a5\u53d7\u7a97\u53e3\u5185\u3002<\/p>\n<p>\u4ece\u9897\u7c92\u7ba1\u63a7\u6307\u6807\u770b\uff0c\u76db\u7f8e\u4e0a\u6d77\u5728\u7ebf\u9884\u6e05\u6d17\u8bbe\u5907\u53ef\u5b9e\u73b037nm\u4ee5\u4e0b\u5269\u4f59\u9897\u7c92\u5c11\u4e8e15\u4e2a\u300128nm\u4ee5\u4e0b20\u81f325\u4e2a\uff0c\u91d1\u5c5e\u6c61\u67d3\u63a7\u5236\u57281E+8\u539f\u5b50\/\u5e73\u65b9\u5398\u7c73\u4ee5\u5185\uff1b\u534e\u6797\u79d1\u7eb3\u7b49\u8bbe\u5907\u5382\u5546\u516c\u5e03\u7684\u6210\u719f\u5236\u7a0b\uff08\u226528nm\uff09\u540eCMP\u6e05\u6d17\u7ba1\u63a7\u6807\u51c6\u4e3a0.2\u03bcm\u9897\u7c92\u226430\u9897\/\u7247\u3001\u53bb\u9664\u7387\u226599%\u3002\u8fd9\u4e9b\u91cf\u5316\u6307\u6807\u5df2\u6210\u4e3a\u56fd\u518512\u82f1\u5bf8\u6676\u5706\u5382\u91c7\u8d2d\u540eCMP\u6e05\u6d17\u8bbe\u5907\u7684\u57fa\u672c\u9a8c\u6536\u95e8\u69db\u3002<\/p>\n<p>\u9488\u5bf9CMP\u540e\u6e05\u6d17\u4e0e\u5e72\u71e5\u7684\u6574\u7ebf\u914d\u5957\uff0c<strong>\u6cb3\u5317\u4e2d\u79d1\u5fae\u7535\u5b50\u6709\u9650\u516c\u53f8<\/strong>\u63d0\u4f9b\u5168\u81ea\u52a8\u5355\u7247\u6676\u5706\u6e05\u6d17\u673a\u4e0e\u6676\u5706\u7529\u5e72\u673a\uff086\/8\u5bf8\u300112\u5bf8\uff09\u7b49\u4ea7\u54c1\uff0c\u5176\u96c6\u9ad8\u901f\u79bb\u5fc3\u7529\u5e72\u4e0e\u53cc\u9762\u6c2e\u6c14\u70ed\u98ce\u70d8\u5e72\u4e8e\u4e00\u4f53\u7684\u8bbe\u8ba1\uff0c\u53ef\u6709\u6548\u627f\u63a5CMP\u540e\u7684\u6f02\u6d17\u4e0e\u5e72\u71e5\u73af\u8282\uff0c\u6291\u5236\u6c34\u75d5\u4e0e\u9897\u7c92\u518d\u6c89\u79ef\uff0c\u5e76\u53ef\u6839\u636e\u4e0d\u540cCMP\u5c42\u7684\u5de5\u827a\u8981\u6c42\u8fdb\u884c\u53c2\u6570\u5b9a\u5236\u3002<\/p>\n<p>\u4ece\u826f\u7387\u6570\u636e\u770b\uff0c\u5316\u5b66\u673a\u68b0\u629b\u5149\u540e\u6e05\u6d17\u73af\u8282\u7684\u9897\u7c92\u6b8b\u7559\u5f80\u5f80\u662f\u9020\u6210\u540e\u7eed\u5149\u523b\u7f3a\u9677\u4e0e\u7535\u53c2\u6570\u5f02\u5e38\u7684\u91cd\u8981\u539f\u56e0\uff0c\u56e0\u6b64\u4e3b\u6d41\u6676\u5706\u5382\u90fd\u5c06\u8be5\u73af\u8282\u7684\u9897\u7c92\u6307\u6807\u4f5c\u4e3a\u5173\u952e\u826f\u7387\u76d1\u63a7\u70b9\uff0c\u5bf9\u6e05\u6d17\u4e0e\u5e72\u71e5\u8bbe\u5907\u7684\u7a33\u5b9a\u6027\u63d0\u51fa\u4e86\u6781\u9ad8\u8981\u6c42\u3002<\/p>\n<p>\u4ece\u7eb3\u7c73\u9897\u7c92\u53bb\u9664\u5230SRD\u5e72\u71e5\uff0cCMP\u540e\u6e05\u6d17\u7684\u6bcf\u4e00\u6b65\u90fd\u5728\u4e3a\u826f\u7387\u628a\u5173\u3002Post-CMP\u6e05\u6d17\u4e0e\u5e72\u71e5\u7684\u6574\u7ebf\u80fd\u529b\uff0c\u6b63\u5728\u6210\u4e3a\u8861\u91cf\u4e00\u5bb6\u6e7f\u6cd5\u8bbe\u5907\u5382\u5546\u662f\u5426\u5177\u5907\u9ad8\u7aef\u5e02\u573a\u7ade\u4e89\u529b\u7684\u91cd\u8981\u6807\u5fd7\u3002\u7a33\u5b9a\u53ef\u91cd\u590d\u7684\u6e05\u6d17\u4e0e\u5e72\u71e5\u5de5\u827a\uff0c\u662fCMP\u540e\u826f\u7387\u5b88\u62a4\u7684\u5173\u952e\u3002\u5982\u9700\u4e86\u89e3Post-CMP\u6e05\u6d17\u4e0e\u7529\u5e72\u5e72\u71e5\u914d\u5957\u65b9\u6848\uff0c\u6b22\u8fce\u54a8\u8be2\u70ed\u7ebf\uff1a17177768881\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u540eCMP\u6e05\u6d17\u9700\u5728CMP\u540e\u7acb\u5373\u53bb\u9664\u6d46\u6599\u7eb3\u7c73\u9897\u7c92\u4e0e\u91d1\u5c5e\u6b8b\u7559\uff0cPVA\u5237\u3001SC-1\u5316\u5b66\u4e0e\u5146\u58f0\u6ce2\u7ec4\u5408\u662f\u4e3b\u6d41\u5de5\u827a\u3002<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_zk_news_lang":"","_zk_news_en_title":"","_zk_news_en_content":"","_zk_news_en_excerpt":"","footnotes":""},"categories":[2],"tags":[],"class_list":["post-107","post","type-post","status-publish","format-standard","hentry","category-xingye-news"],"_links":{"self":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/posts\/107","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=107"}],"version-history":[{"count":5,"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/posts\/107\/revisions"}],"predecessor-version":[{"id":412,"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/posts\/107\/revisions\/412"}],"wp:attachment":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=107"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=107"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=107"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}