{"id":12,"date":"2026-10-08T00:35:52","date_gmt":"2026-10-07T16:35:52","guid":{"rendered":"http:\/\/zkmsemi.com\/index.php\/product\/%e5%85%a8%e8%87%aa%e5%8a%a8%e5%8d%95%e7%89%87%e6%99%b6%e5%9c%86%e6%b8%85%e6%b4%97%e6%9c%ba\/"},"modified":"2026-10-11T21:39:22","modified_gmt":"2026-10-11T13:39:22","slug":"qzdqxj","status":"publish","type":"product","link":"https:\/\/zkmsemi.com\/?product=qzdqxj","title":{"rendered":"\u5168\u81ea\u52a8\u5355\u7247\u6676\u5706\u6e05\u6d17\u673a"},"content":{"rendered":"

\u4e00\u3001\u8bbe\u5907\u63cf\u8ff0<\/strong><\/p>\n

1.1\u8bbe\u5907\u6982\u8ff0<\/p>\n

\u5168\u81ea\u52a8\u5355\u7247\u6676\u5706\u6e05\u6d17\u673a\u91c7\u7528\u5148\u8fdb\u7684\u6e05\u6d17\u6280\u672f\u548c\u81ea\u52a8\u5316\u63a7\u5236\u7cfb\u7edf\uff0c\u80fd\u591f\u5728\u65e0\u5c18\u73af\u5883\u4e2d\u5bf9\u5355\u4e2a\u6676\u5706\u8fdb\u884c\u9ad8\u6548\u4e14\u7cbe\u786e\u7684\u6e05\u6d17\u5904\u7406\u3002\u8be5\u8bbe\u5907\u901a\u5e38\u5305\u542b\u6676\u5706\u4f20\u8f93\u7cfb\u7edf\u3001\u5316\u5b66\u6eb6\u6db2\u4f9b\u7ed9\u7cfb\u7edf\u3001\u8d85\u7eaf\u6c34\u51b2\u6d17\u7cfb\u7edf\u3001\u5e72\u71e5\u7cfb\u7edf\u7b49\u4e3b\u8981\u7ec4\u6210\u90e8\u5206\u3002<\/p>\n

\u6676\u5706\u4f20\u8f93\u7cfb\u7edf\uff1a\u4f7f\u7528\u673a\u68b0\u624b\u6216\u673a\u5668\u4eba\u5b9e\u73b0\u6676\u5706\u4ece\u88c5\u8f7d\u5230\u5378\u8f7d\u7684\u5168\u7a0b\u81ea\u52a8\u5316\u642c\u8fd0\u3002<\/p>\n

\u5316\u5b66\u6eb6\u6db2\u4f9b\u7ed9\u7cfb\u7edf\uff1a\u6839\u636e\u5de5\u827a\u9700\u6c42\u63d0\u4f9b\u4e0d\u540c\u79cd\u7c7b\u548c\u6d53\u5ea6\u7684\u5316\u5b66\u6e05\u6d17\u5242\u3002<\/p>\n

\u8d85\u7eaf\u6c34\u51b2\u6d17\u7cfb\u7edf\uff1a\u5229\u7528\u9ad8\u7eaf\u5ea6\u53bb\u79bb\u5b50\u6c34\u53bb\u9664\u6676\u5706\u8868\u9762\u6b8b\u7559\u7269\u3002<\/p>\n

\u5146\u58f0\u7cfb\u7edf\uff1a\u5146\u58f0\u6c34\u53bb\u9664\u6676\u5706\u8868\u9762\u5fae\u5c0f\u6b8b\u7559\u7269\u3002<\/p>\n

1.2\u5de5\u827a\u6d41\u7a0b<\/p>\n

\u6676\u5706\u88c5\u8f7d\uff1a\u5c06\u5f85\u6e05\u6d17\u7684\u6676\u5706\u653e\u7f6e\u4e8e\u4e13\u7528\u8f7d\u4f53\u4e2d\u5e76\u9001\u5165\u8bbe\u5907\u3002<\/p>\n

\u5316\u5b66\u6e05\u6d17\uff1a\u6839\u636e\u9700\u8981\u9009\u62e9\u5408\u9002\u7684\u5316\u5b66\u6eb6\u6db2\u8fdb\u884c\u6d78\u6e0d\u6216\u55b7\u6dcb\u6e05\u6d17\u3002<\/p>\n

\u8d85\u7eaf\u6c34\u51b2\u6d17\uff1a\u7528\u8d85\u7eaf\u6c34\u5f7b\u5e95\u51b2\u6d17\u6389\u5316\u5b66\u6eb6\u5242\u53ca\u6b8b\u7559\u7269\u8d28\u3002<\/p>\n

\u5146\u58f0\u7cfb\u7edf\uff1a\u5146\u58f0\u6c34\u53bb\u9664\u6676\u5706\u8868\u9762\u5fae\u5c0f\u6b8b\u7559\u7269\u3002<\/p>\n

\u6676\u5706\u5378\u8f7d\uff1a\u5b8c\u6210\u6e05\u6d17\u540e\u7684\u6676\u5706\u88ab\u5b89\u5168\u5730\u79fb\u51fa\u8bbe\u5907\u3002<\/p>\n

1.3\u5e03\u5c40\u521d\u7f29\u7565\u4fe1\u606f\uff08\u4ee5\u5b9e\u9645\u8bbe\u8ba1\u4e3a\u51c6\uff09<\/p>\n

\u8bbe\u5907\u5916\u89c2<\/p>\n

\u6e05\u6d17\u5355\u5143\u8bbe\u8ba1<\/p>\n

\u8bbe\u8ba1\u8981\u70b9\uff1a<\/p>\n

1\u3001\u6c34\u69fd\u5e95\u90e8\u4f4dV\u578b\uff0c\u4fbf\u4e8e\u6392\u836f\u6392\u6c34\uff0c\u4e0d\u6613\u6b8b\u7559\u3002<\/p>\n

2\u3001\u55b7\u836f\u55b7\u6c34\u4e3a\u65cb\u8f6c\u6446\u81c2\u7ed3\u6784\uff0c\u5916\u5305\u4e3a\u7279\u6c1f\u9f99\u6750\u6599\u6d01\u51c0\u8010\u8150\u8010\u78e8\u6750\u6599\uff08\u8010\u786b\u9178\u8150\u8680\uff09\uff0c\u907f\u514d\u836f\u6db2\u98de\u6e85\u8150\u8680\u4ee5\u53ca\u8fd0\u52a8\u4ea7\u751f\u9897\u7c92\u3002<\/p>\n

3\u3001\u4e3b\u8f74\u7535\u673a\u4e3a\u4e2d\u7a7a\u76f4\u9a71\u7535\u673a\uff0c\u907f\u514d\u76ae\u5e26\u4f20\u52a8\u4ea7\u751f\u7684\u9897\u7c92\u53ca\u9707\u52a8\u3002<\/p>\n

4\u3001\u6240\u6709\u7535\u673a\u53ca\u6c14\u7f38\u5728\u8154\u5ba4\u5e95\u90e8\uff0c\u907f\u514d\u8150\u8680\u6027\u6c14\u4f53\u5bf9\u90e8\u4ef6\u7684\u635f\u574f\uff0c\u540c\u65f6\u907f\u514d\u52a8\u4f5c\u9891\u7e41\u4ea7\u751f\u7684\u9897\u7c92\u5bf9\u6e05\u6d17\u6676\u5706\u9020\u6210\u6c61\u67d3\u3002<\/p>\n

5\u3001\u6392\u98ce\u5206\u4e3a\u8154\u5ba4\u4fa7\u9762\u4e09\u8def\u6392\u98ce\u53ca\u6392\u836f\u5e95\u90e8\u6392\u98ce\uff0c\u907f\u514d\u8154\u5ba4\u5185\u548c\u6392\u836f\u7ba1\u8def\u836f\u6db2\u6325\u53d1\u5bf9\u6676\u5706\u4ea7\u751f\u7684\u5f71\u54cd\u30023\u4e2a\u8154\u5ba4\u914d\u4e24\u6839110mm\u6392\u98ce\u7ba1\uff0c\u5171\u8ba1\u56db\u6839\u4e3b\u6392\u98ce\u7ba1\u3002\u6bcf\u4e2a\u8154\u5ba4\u914d\u6392\u98ce\u8c03\u8282\u9600\u3002<\/p>\n

6\u3001\u6e05\u6d17\u5206\u4e3a\u6b63\u9762\u6e05\u6d17\u53ca\u80cc\u9762\u6e05\u6d17\uff0c\u6b63\u9762\u80cc\u9762\u5206\u522b\u914d\u6709\u56de\u5438\u4e00\u4f53\u9600\u53ca\u624b\u52a8\u6d41\u91cf\u9600\uff0c\u53ef\u5355\u72ec\u8c03\u8282\u3002\u6b63\u9762\u3001\u80cc\u9762\u914d\u6709\u5728\u7ebf\u5f0f\u6d41\u91cf\u8ba1\uff0c\u53ef\u76d1\u63a7\u6d41\u91cf\u662f\u5426\u5728\u8981\u6c42\u8303\u56f4\u5185\uff0c\u5e76\u8bbe\u5b9a\u62a5\u8b66\u63d0\u793a\u3002<\/p>\n

7\u3001CHUCK\u91c7\u7528\u7f15\u7a7a\u5f0f\uff08\u8010\u9ad8\u6e29\u786b\u9178\u8150\u8680\uff09\uff0c\u9632\u6b62\u836f\u6db2\u98de\u6e85\u56de\u5f39\uff0c\u4ea7\u751f\u6c34\u836f\u5370\uff0c\u9020\u6210\u826f\u7387\u964d\u4f4e\u3002\u6321\u67f1\u4e0e\u5e95\u76d8\u8fde\u63a5\u7262\u56fa\u53ef\u9760\u4e14\u65b9\u4fbf\u66f4\u6362\uff0c\u9ad8\u901f\u65cb\u8f6c\u65f6\u6700\u5927\u5f84\u5411\u4f4d\u79fb\u4e0d\u8d85\u8fc70.5mm\uff0c\u788e\u7247\u7387<0.05%;  \u80cc\u9762\u51fa\u836f\u5e73\u53f0\u65e0\u836f\u6db2\u6b8b\u7559\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

\u5168\u81ea\u52a8\u5355\u7247\u6676\u5706\u6e05\u6d17\u673a\u91c7\u7528\u5148\u8fdb\u7684\u6e05\u6d17\u6280\u672f\u548c\u81ea\u52a8\u5316\u63a7\u5236\u7cfb\u7edf\uff0c\u80fd\u591f\u5728\u65e0\u5c18\u73af\u5883\u4e2d\u5bf9\u5355\u4e2a\u6676\u5706\u8fdb\u884c\u9ad8\u6548\u4e14\u7cbe\u786e\u7684\u6e05\u6d17\u5904\u7406\u3002\u8be5\u8bbe\u5907\u901a\u5e38\u5305\u542b\u6676\u5706\u4f20\u8f93\u7cfb\u7edf\u3001\u5316\u5b66\u6eb6\u6db2\u4f9b\u7ed9\u7cfb\u7edf\u3001\u8d85\u7eaf\u6c34\u51b2\u6d17\u7cfb\u7edf\u3001\u5e72\u71e5\u7cfb\u7edf\u7b49\u4e3b\u8981\u7ec4\u6210\u90e8\u5206\u3002<\/p>\n","protected":false},"featured_media":0,"template":"","meta":{"_zk_img":"\/assets\/products\/qzdqxj.png","_zk_specs":"\u52a0\u5de5\u5c3a\u5bf8<\/th>\u540c\u65f6\u517c\u5bb9 2\/3\/4\u5bf8\u6676\u5706\u4e0d\u53ef\u540c\u65f6\u517c\u5bb9CHUCK\u5c31\u8981\u65b9\u4fbf\u66f4\u6362\uff0c\u4ee5\u666e\u901a\u64cd\u4f5c\u5de5\u5373\u53ef\u5b8c\u6210\u66f4\u6362\u4e3a\u6807\u51c6\uff0c\u66f4\u6362\u4e00\u4e2aCHUCK\u7684\u65f6\u95f4\u4e0d\u8d85\u8fc75\u5206\u949f\uff0c\u6240\u6709\u96f6\u90e8\u4ef6\u8010\u9ad8\u6e29\u786b\u9178\u8150\u8680\uff0c\u4e14\u4e0d\u6613\u78e8\u635f\uff09<\/td><\/tr>\u5355\u6b21 \u6e05\u6d17 \u6570\u91cf<\/th>6\u7247<\/td><\/tr>\u5de5 \u4f4d\u6570\u91cf \uff08\u4e2a\uff09<\/th>6<\/td><\/tr>\u673a\u53f0\u4e0a\u4e0b\u7247\u65b9\u5f0f<\/th>\u81ea\u52a8\u4e0a\u4e0b\u7247<\/td><\/tr>\u65cb\u8f6c\u901f\u5ea6   RPM \/ MIN<\/th>5 - 5000 rpm\u53ef\u8bbe\u5b9a<\/td><\/tr>\u6e05\u6d17\u65b9\u5f0f<\/th>\u836f\u6db2\u6e05\u6d17 \/\u7eaf\u6c34\u6e05\u6d17\/\u5146\u58f0\u6e05\u6d17<\/td><\/tr>\u836f\u6db2\u6570\u91cf<\/th>5\u79cd<\/td><\/tr>\u6e05\u6d17\u7c7b\u578b<\/th>\u4e0a\u6e05\u6d17 (\u836f\u6db2\u6e05\u6d17-\u7eaf\u6c34\u6e05\u6d17)\u6446\u81c21 (\u5146\u58f0\u6e05\u6d17-\u4e8c\u6d41\u4f53\u6e05\u6d17)\u6446\u81c22 \u4e0b\u6e05\u6d17\uff08\u836f\u6db2\u6e05\u6d17 -\u7eaf\u6c34\u6e05\u6d17\uff09 \uff08\u4e3b\u80cc\u9762\u540c\u65f6\u4f9b\u7ed9\u4e0d\u540c\u836f\u6db2\uff0c\u6bd4\u5982\u6b63\u9762\u8fc7\u836f\u80cc\u9762\u51b2\u6c34\uff09<\/td><\/tr>\u9002\u7528\u836f\u6db2\u7c7b\u578b<\/th>\u4e19\u916e\uff0c\u5f02\u4e19\u9187\uff0c\u53bb\u80f6\u6db2\uff0c\u6c1f\u5316\u94f5\uff0c\u6c22\u6c27\u5316\u94be<\/td><\/tr>\u4f9b\u836f\u65b9\u5f0f<\/th>\u6c2e\u6c14\u538b\u63a7\uff0c\u914d\u538b\u529b\u76d1\u63a7\uff0c\u4f9b\u836f\u5e73\u7a33\u65e0\u6296\u52a8\uff0c\u836f\u6db2\u69fd\u5207\u6362\u4fdd\u6301\u5e73\u7a33\u8fc7\u6e21\uff08\u5206\u6210\u4e24\u4e2a\u538b\u529b\u9600\u63a7\u5236\uff09<\/td><\/tr>\u836f\u6db2\u69fd<\/th>10\u4e2a4L PVDF\u836f\u6db2\u69fd \u4e00\u5907\u4e00\u7528\u3002\u914d\u81ea\u52a8\u5438\u836f\u88c5\u7f6e\u3002\uff08\u4e0d\u540c\u5bb9\u91cf\u7684\u836f\u6db2\u51fa\u836f\u538b\u529b\u4fdd\u6301\u4e00\u81f4\uff0c\u6d41\u91cf\u6ce2\u52a810%\u4ee5\u5185\uff09\uff0c\u589e\u52a0\u7528\u4e8e\u56fa\u5b9a\u5916\u63a5\u836f\u6db2\uff08\u5e9f\u9178\uff09\u6392\u653e\u88c5\u7f6e\uff0c\u8bbe\u7f6e\u6db2\u4f4d\u62a5\u8b66\u88c5\u7f6e\u53ca\u8054\u9501\u88c5\u7f6e\u3002 \u989d\u5916\u914d 5\u4e2a20L \u65b9\u5f62\u6c1f\u5316\u6876<\/td><\/tr>\u836f\u6db2\u51fa\u53e3\u5c3a\u5bf8<\/th>\u5916\u5f84 4mm\u5185\u5f842mm<\/td><\/tr>\u836f\u6db2\u6d41\u91cf\u8c03\u8282<\/th>10\u8def\uff08\u4e0a\u836f\u6db25\u8def\uff0c\u4e0b\u836f\u6db25\u8def\uff09*6\u8154\u5ba4 PFA\u624b\u9600 10ml-1000ml\/min<\/td><\/tr>\u836f\u6db2\u6d41\u91cf\u76d1\u63a7<\/th>10\u8def\uff08\u4e0a\u836f\u6db25\u8def\uff0c\u4e0b\u836f\u6db25\u8def\uff09*6\u8154\u5ba4<\/td><\/tr>\u836f\u6db2\u52a0\u70ed<\/th>1\u8def   70\u2103\u00b15\u2103\uff08\u53ef\u8fbe90\u2103\uff09,6\u8def\u4fdd\u6301\u4e00\u81f4 \uff08\u91c7\u7528\u836f\u7f50\u5185\u836f\u6db2\u5faa\u73af\u52a0\u70ed\u53ca\u7ec8\u7aef\u7535\u52a0\u70ed\u8865\u5145\uff0c\u4fdd\u8bc1\u6e29\u5ea6\u8fbe\u6807\uff08\u7ba1\u5185\u9178\u6e29\u80fd\u68c0\u6d4b\uff09\uff09\uff0c\u52a0\u70ed\u5e26\u66f4\u6362\u65b9\u4fbf<\/td><\/tr>\u7eaf\u6c34\u51b2\u6d17<\/th>\u6b63\u9762 1\u8def *6\u8154\u5ba4  \u80cc\u97621\u8def *6\u8154\u5ba4<\/td><\/tr>\u7eaf\u6c34\u51fa\u53e3\u5c3a\u5bf8<\/th>1\/4\uff086.35mm*4.35\uff09<\/td><\/tr>\u7eaf\u6c34\u6d41\u91cf\u8c03\u8282<\/th>1\u8def*6 PFA\u624b\u9600 10ml-1000ml\/min<\/td><\/tr>\u7eaf\u6c34\u6d41\u91cf\u76d1\u63a7<\/th>\u6b63\u9762 1\u8def *6\u8154\u5ba4  \u80cc\u97621\u8def *6\u8154\u5ba4<\/td><\/tr>\u7eaf\u6c34\u7535\u963b\u7387\u76d1\u63a7<\/th>\u8fdb\u6c34\u4e3b\u7ba1\u8def\u76d1\u63a7\u7535\u963b\u7387\uff0c\u6e29\u5ea6\uff0c\u538b\u529b<\/td><\/tr>\u5146\u58f0\u6c34\u51b2\u6d17<\/th>1\u8def*6\u8154\u5ba4<\/td><\/tr>\u5146\u58f0\u6c34\u6d41\u91cf\u8c03\u8282<\/th>1\u8def*6 PFA\u624b\u9600 100ml-3000ml\/min<\/td><\/tr>\u6e05\u6d17 \u7529\u5e72\u65f6\u95f4<\/th>30-300S \u53ef\u8c03\u8282\u4e3b\u8f74\u52a0\u51cf\u901f<\/td><\/tr>\u663e\u793a \/ \u63a7\u5236\u7cfb\u7edf<\/th>15 \u5bf8\u89e6\u6478\u5c4f + PLC\u53ef\u7f16\u7a0b\u63a7\u5236\u5668<\/td><\/tr>\u5185\u90e8\u7ba1\u8def\u6750\u6599<\/th>PFA<\/td><\/tr>\u9876\u90e8\u65b0\u98ce\u8fc7\u6ee4\u5668<\/th>U17\u9ad8\u6548\uff08\u6ee1\u8db3\u8154\u4f53\u5185\u5341\u7ea7\u51c0\u5316\uff09<\/td><\/tr>\u836f\u6db2\u6e29\u5ea6\u76d1\u63a7<\/th>\u4e94\u79cd\u836f\u6db2\u6e29\u5ea6\u663e\u793a<\/td><\/tr>\u76d1\u63a7\u6570\u636e<\/th>\u6240\u6709\u76d1\u63a7\u6570\u636e\u90fd\u80fd\u5728\u663e\u793a\u5c4f\u4e0a\u6e05\u6670\u51c6\u786e\u663e\u793a\uff0c\u4e14\u76d1\u63a7\u6570\u636e\u80fd\u4e0e MES\u7cfb\u7edf\u8fde\u63a5<\/td><\/tr>\u7a0b\u5e8f<\/th>1 2 3 4\u82b1\u7bee\u5de5\u4f4d\uff0c\u4e0a\u6599\u662f1 2 \u4e0b\u6599\u662f3 4\uff081-3\u5bf9\u5e94 2-4\u5bf9\u5e94\uff09 \u4e0a\u6599 1 2\u53ef\u4ee5\u8bbe\u5b9a\u4e0d\u540c\u6e05\u6d17\u5de5\u4f4d\u548c\u4e0d\u540c\u6e05\u6d17\u7a0b\u5e8f\u53ef\u5728\u83dc\u5355\u4e2d\u4e0d\u540c\u7ec4\u5408 \u4e2d\u5fc3\u5bf9\u4e2d\u517c\u5bb9 2 3 4\u540c\u65f6\u6e05\u6d17\u3002<\/td><\/tr>","_zk_keywords":"\u5168\u81ea\u52a8\u5355\u7247\u6676\u5706\u6e05\u6d17\u673a \u00b7 \u81ea\u52a8\u6676\u5706\u6e05\u6d17\u673a \u00b7 \u6676\u5706\u6e05\u6d17\u673a","_zk_en_title":"Fully Automatic Single-Wafer Cleaning Machine","_zk_en_content":"

1. Machine Description<\/strong><\/p>

1.1 Overview<\/p>

The fully automatic single-wafer cleaning machine adopts advanced cleaning technology and an automated control system to clean each wafer efficiently and precisely in a dust-free environment. It typically includes a wafer transfer system, chemical solution supply system, UPW rinse system and drying system.<\/p>

Wafer transfer: robot or manipulator handles wafers automatically from loading to unloading.<\/p>

Chemical supply: provides different types and concentrations of chemical cleaners per process.<\/p>

UPW rinse: high-purity deionized water removes residues from the wafer surface.<\/p>

Megasonic system: megasonic water removes tiny residues from the wafer surface.<\/p>

1.2 Process Flow<\/p>

Wafer loading: wafers placed in dedicated carriers and fed into the machine.<\/p>

Chemical cleaning: suitable chemicals selected for immersion or spray cleaning.<\/p>

UPW rinse: ultra-pure water thoroughly rinses chemicals and residues.<\/p>

Megasonic: megasonic water removes tiny surface residues.<\/p>

Wafer unloading: cleaned wafers safely removed.<\/p>

1.3 Layout (subject to final design)<\/p>

Machine appearance<\/p>

Cleaning unit design<\/p>

Design highlights:<\/p>

1. V-shaped tank bottom for easy drain, no residue.<\/p>

2. Rotating swing-arm spray, Teflon-coated, clean, corrosion- and wear-resistant (sulfuric acid resistant), preventing splashing corrosion and particle generation.<\/p>

3. Hollow direct-drive spindle motor, avoiding particles and vibration from belt drive.<\/p>

4. All motors and cylinders at the chamber bottom, avoiding corrosive gas damage and particle contamination of wafers.<\/p>

5. Exhaust: three side exhausts per chamber plus bottom chemical exhaust; 3 chambers with two 110mm exhaust pipes (4 main pipes total), each chamber with exhaust regulating valve.<\/p>

6. Front and back cleaning with integrated suction valves and manual flow valves, independently adjustable; in-line flow meters on both sides with alarm if out of range.<\/p>

7. Hollow CHUCK (high-temp sulfuric acid resistant) prevents splash rebound and water\/chemical marks that reduce yield. Retaining posts firmly fixed to the base, easy to replace; max radial displacement <= 0.5mm at high speed; breakage rate < 0.05%; no chemical residue on the back-side platform.<\/p>","_zk_en_specs":"Wafer Size<\/th>2\/3\/4 inch compatible (quick Chuck change within 5 min by regular operator); all parts high-temp sulfuric acid resistant and wear-resistant<\/td><\/tr>Wafers per Cycle<\/th>6<\/td><\/tr>Stations<\/th>6<\/td><\/tr>Loading<\/th>Automatic<\/td><\/tr>Rotation Speed RPM\/MIN<\/th>5-5000 rpm settable<\/td><\/tr>Cleaning<\/th>Chemical \/ DIW \/ megasonic<\/td><\/tr>Chemical Types<\/th>5<\/td><\/tr>Cleaning Modes<\/th>Top cleaning (chemical-DIW) arm 1 (megasonic-two-fluid) arm 2; bottom cleaning (chemical-DIW); front & back can receive different chemicals simultaneously<\/td><\/tr>Chemicals Supported<\/th>Acetone, IPA, resist stripper, ammonium fluoride, KOH<\/td><\/tr>Supply Method<\/th>N2 pressure control with pressure monitoring, smooth supply, smooth tank switching (two pressure valves)<\/td><\/tr>Chemical Tanks<\/th>10 x 4L PVDF (one spare per use) with auto suction; waste-acid discharge, level alarm & interlock; plus 5 x 20L square fluorinated barrels<\/td><\/tr>Outlet Size<\/th>OD4mm \/ ID2mm<\/td><\/tr>Chemical Flow Control<\/th>10 lines (5 top, 5 bottom) x 6 chambers, PFA manual valve 10-1000ml\/min<\/td><\/tr>Chemical Flow Monitoring<\/th>10 lines x 6 chambers<\/td><\/tr>Chemical Heating<\/th>1 line, 70 deg C +\/- 5 deg C (up to 90 deg C), 6 chambers consistent; tank circulation + terminal electric heating<\/td><\/tr>DIW Rinse<\/th>Front 1 line x 6 chambers; back 1 line x 6 chambers<\/td><\/tr>DIW Outlet<\/th>1\/4 (6.35 x 4.35mm)<\/td><\/tr>DIW Flow Control<\/th>1 x 6 PFA manual valve 10-1000ml\/min<\/td><\/tr>DIW Flow Monitoring<\/th>Front 1 x 6 chambers; back 1 x 6 chambers<\/td><\/tr>DIW Resistivity<\/th>Monitored on main inlet (resistivity, temperature, pressure)<\/td><\/tr>Megasonic Rinse<\/th>1 line x 6 chambers<\/td><\/tr>Megasonic Flow<\/th>1 x 6 PFA manual valve 100-3000ml\/min<\/td><\/tr>Cycle Time<\/th>30-300s, spindle accel\/decel adjustable<\/td><\/tr>Display\/Control<\/th>15 inch touch screen + PLC<\/td><\/tr>Piping<\/th>PFA<\/td><\/tr>Top Fresh-Air Filter<\/th>U17 HEPA (Class 10 chamber)<\/td><\/tr>Chemical Temp Monitoring<\/th>5 chemical temperatures displayed<\/td><\/tr>Monitoring Data<\/th>All data clearly displayed; connectable to MES<\/td><\/tr>Program<\/th>1\/2\/3\/4 cassette stations; load 1-2, unload 3-4 (1-3, 2-4 correspond); different cleaning stations\/recipes combinable in menu; center alignment for 2\/3\/4 simultaneous cleaning<\/td><\/tr>","_zk_en_keywords":"Fully Automatic Single-Wafer Cleaner,Automatic Wafer Cleaning Machine,Single-Wafer Wet Cleaner,Wafer Cleaning Machine","_zk_en_excerpt":"Fully automatic single-wafer cleaning machine adopts advanced cleaning technology and automated control to clean each wafer efficiently and precisely in a dust-free environment - wafer transfer, chemical supply, UPW rinse and drying systems integrated."},"product_cat":[4],"class_list":["post-12","product","type-product","status-publish","hentry","product_cat-4"],"_links":{"self":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/product\/12","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/product"}],"about":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/types\/product"}],"wp:attachment":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=12"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fproduct_cat&post=12"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}