{"id":14,"date":"2026-10-08T00:35:53","date_gmt":"2026-10-07T16:35:53","guid":{"rendered":"http:\/\/zkmsemi.com\/index.php\/product\/12%e5%af%b8%e6%99%b6%e5%9c%86%e7%94%a9%e5%b9%b2%e6%9c%ba%ef%bc%88%e5%8d%95%e7%89%87%e6%b8%85%e6%b4%97%e7%94%a9%e5%b9%b2%e6%9c%ba%ef%bc%89\/"},"modified":"2026-10-11T21:39:20","modified_gmt":"2026-10-11T13:39:20","slug":"12qxj","status":"publish","type":"product","link":"https:\/\/zkmsemi.com\/?product=12qxj","title":{"rendered":"EFEM\u4e13\u7528\u6e05\u6d17\u7529\u5e72\u673a"},"content":{"rendered":"

01 \u4ea7\u54c1\u6982\u8ff0<\/strong><\/p>\n

\u2500\u2500\u2500\u2500<\/p>\n

SG-8-12-2D EFEM\u4e13\u7528\u6e05\u6d17\u7529\u5e72\u673a\u662f\u4e00\u6b3e\u4e13\u4e3a\u8bbe\u5907\u524d\u7aef\u6a21\u5757\uff08Equipment Front End Module\uff0cEFEM\uff09\u96c6\u6210\u914d\u5957\u7684\u9ad8\u6d01\u51c0\u5ea6\u6676\u5706\u6e05\u6d17\u5e72\u71e5\u8bbe\u5907\uff0c\u96c6\u9ad8\u901f\u79bb\u5fc3\u7529\u5e72\u4e0e\u53cc\u9762\u6c2e\u6c14\u70ed\u98ce\u70d8\u5e72\u4e8e\u4e00\u4f53\uff0c\u517c\u5177\u9ad8\u6548\u7387\u3001\u5e7f\u517c\u5bb9\u4e0e\u4f4e\u6210\u672c\u4f18\u52bf\u3002\u8bbe\u5907\u901a\u8fc7\u5feb\u901f\u66f4\u6362 Chuck\uff08\u7529\u5e72\u5934\uff09\uff0c\u53ef\u8986\u76d6 2~12 \u82f1\u5bf8\u534a\u5bfc\u4f53\u6676\u5706\u3001\u63a9\u819c\u7248\u53ca\u5404\u7c7b\u57fa\u7247\u7684\u6e05\u6d17\u5e72\u71e5\u9700\u6c42\uff1b\u65e2\u53ef\u72ec\u7acb\u5de5\u4f4d\u5355\u673a\u4f7f\u7528\uff0c\u4e5f\u53ef\u76f4\u63a5\u5d4c\u5165 EFEM \u8bbe\u5907\u524d\u7aef\u6a21\u5757\uff0c\u4e0e\u6676\u5706\u4f20\u8f93\u673a\u68b0\u624b\u3001\u88c5\u8f7d\u7aef\u53e3\uff08Load Port\uff09\u65e0\u7f1d\u5bf9\u63a5\uff0c\u878d\u5165\u5ba2\u6237\u6574\u4f53\u91cf\u4ea7\u4ea7\u7ebf\u3002<\/p>\n

\u25cf \u4ea7\u54c1\u540d\u79f0\uff1a<\/strong>EFEM\u4e13\u7528\u6e05\u6d17\u7529\u5e72\u673a<\/p>\n

\u25cf \u4ea7\u54c1\u578b\u53f7\uff1a<\/strong>SG-8-12-2D<\/p>\n

\u25cf \u5e94\u7528\u9886\u57df\uff1a<\/strong>EFEM\u8bbe\u5907\u524d\u7aef\u6a21\u5757 \u00b7 \u534a\u5bfc\u4f53\u6676\u5706 \u00b7 \u63a9\u819c\u677f \u00b7 \u5404\u7c7b\u57fa\u7247 \u6e05\u6d17\u5e72\u71e5\u5de5\u827a<\/p>\n

\u25cf \u6838\u5fc3\u7279\u70b9\uff1a<\/strong>EFEM\u96c6\u6210 \u00b7 \u9ad8\u901f\u7529\u5e72 \u00b7 \u53cc\u9762\u5439\u6c14\u70d8\u5e72 \u00b7 \u5feb\u901f\u6362\u578b \u00b7 \u9ad8\u6d01\u51c0\u5ea6<\/p>\n

01 EFEM \u9002\u914d\u7279\u6027<\/strong><\/p>\n

\u2500\u2500\u2500\u2500<\/p>\n

\u2705 \u4e0e EFEM \u8bbe\u5907\u524d\u7aef\u6a21\u5757\u65e0\u7f1d\u96c6\u6210<\/strong><\/p>\n

\u6807\u51c6\u673a\u68b0\u63a5\u53e3\u4e0e\u7535\u6c14\u63a5\u53e3\u8bbe\u8ba1\uff0c\u53ef\u76f4\u63a5\u5bf9\u63a5 EFEM \u88c5\u8f7d\u7aef\u53e3\u4e0e\u4f20\u8f93\u673a\u68b0\u624b\uff0c\u652f\u6301\u6676\u5706\u81ea\u52a8\u4e0a\u4e0b\u6599\uff0c\u6ee1\u8db3\u524d\u3001\u540e\u9053\u5de5\u5e8f\u81ea\u52a8\u5316\u8fde\u7ebf\u9700\u6c42\u3002<\/p>\n

\u2705 SECS-GEM \/ SMEMA \u901a\u4fe1\uff08\u53ef\u5b9a\u5236\uff09<\/strong><\/p>\n

\u652f\u6301\u4e0a\u4f4d\u673a\u8054\u673a\u63a7\u5236\uff0c\u53ef\u63a5\u5165 EFEM \u8bbe\u5907\u7ba1\u7406\u7cfb\u7edf\u4e0e\u4ea7\u7ebf MES \u7cfb\u7edf\uff0c\u5b9e\u73b0\u5de5\u827a\u53c2\u6570\u8fdc\u7a0b\u8bbe\u5b9a\u3001\u72b6\u6001\u76d1\u63a7\u4e0e\u6570\u636e\u8ffd\u6eaf\u3002<\/p>\n

\u2705 \u7d27\u51d1\u578b\u96c6\u6210\u8bbe\u8ba1<\/strong><\/p>\n

\u6574\u673a\u5916\u5f62\u5c3a\u5bf8 450\u00d7490\u00d7660 mm\uff0c\u5360\u5730\u9762\u79ef\u5c0f\uff0c\u9002\u914d EFEM \u96c6\u6210\u7a7a\u95f4\u8981\u6c42\uff0c\u4fbf\u4e8e\u4ea7\u7ebf\u5e03\u5c40\u4e0e\u81ea\u52a8\u5316\u6539\u9020\u3002<\/p>\n

\u2705 \u5916\u63a7\u542f\u52a8 \/ \u4e0a\u4f4d\u673a\u901a\u4fe1<\/strong><\/p>\n

\u652f\u6301\u5916\u90e8\u4fe1\u53f7\u542f\u52a8\u4e0e\u4e0a\u4f4d\u673a\u901a\u4fe1\uff0c\u53ef\u4e0e EFEM \u673a\u68b0\u624b\u8054\u52a8\u65f6\u5e8f\u63a7\u5236\uff0c\u4fdd\u969c\u81ea\u52a8\u5316\u751f\u4ea7\u8282\u62cd\u3002<\/p>\n

02 \u7ed3\u6784\u7ec4\u6210\u4e0e\u7279\u70b9<\/strong><\/p>\n

\u2500\u2500\u2500\u2500<\/p>\n

\u2705 \u8fdb\u53e3 PP \u677f\u673a\u8eab\u5916\u58f3<\/strong><\/p>\n

\u91c7\u7528\u8fdb\u53e3\u805a\u4e19\u70ef\u677f\u6750\u5236\u9020\uff0c\u8010\u8150\u8680\u3001\u4f4e\u9897\u7c92\u6790\u51fa\uff0c\u5b8c\u5168\u6ee1\u8db3\u6d01\u51c0\u5ba4\u5de5\u4f5c\u73af\u5883\u8981\u6c42\u3002<\/p>\n

\u2705 \u4e13\u7528\u4f3a\u670d\u7535\u673a\u9a71\u52a8\u7cfb\u7edf<\/strong><\/p>\n

\u8f6c\u901f\u8303\u56f4 10~4000 RPM \u65e0\u7ea7\u53ef\u8c03\uff1a\u4f4e\u901f\u6bb5\u5747\u5300\u6e05\u6d17\uff0c\u9ad8\u901f\u6bb5\u5f3a\u529b\u79bb\u5fc3\u7529\u5e72\uff0c\u4e00\u673a\u4e24\u7528\u3002<\/p>\n

\u2705 \u5de5\u4e1a PLC \u63a7\u5236\u5668 + 7 \u5bf8\u89e6\u6478\u5c4f<\/strong><\/p>\n

\u7a33\u5b9a\u53ef\u9760\u7684\u5de5\u4e1a\u7ea7\u63a7\u5236\u7cfb\u7edf\uff0c\u76f4\u89c2\u53ef\u89c6\u5316\u4eba\u673a\u754c\u9762\uff0c\u64cd\u4f5c\u7b80\u4fbf\uff0c\u5de5\u827a\u53c2\u6570\u4e00\u952e\u8bbe\u5b9a\u3002<\/p>\n

\u2705 PFA \u5168\u6c1f\u7ba1\u8def\u7cfb\u7edf<\/strong><\/p>\n

\u53bb\u79bb\u5b50\u6c34\u53ca\u6c2e\u6c14\u7ba1\u8def\u91c7\u7528 PFA \u5168\u6c1f\u6750\u8d28\uff0c\u8010\u5316\u5b66\u8150\u8680\u3001\u4f4e\u91d1\u5c5e\u6790\u51fa\uff0c\u4fdd\u969c\u9ad8\u6d01\u51c0\u5ea6\u5de5\u827a\u73af\u5883\u3002<\/p>\n

\u2705 \u53cc\u9762\u6c2e\u6c14\u5439\u6c14\u70d8\u5e72<\/strong><\/p>\n

\u6b63\u53cd\u4e24\u9762\u72ec\u7acb\u63a7\u5236\u6c2e\u6c14\u6d41\u91cf\uff0c90~120 \u79d2\u5f7b\u5e95\u5e72\u71e5\uff0c\u65e0\u6c34\u75d5\u3001\u65e0\u9897\u7c92\u6b8b\u7559\u3002<\/p>\n

\u2705 \u5feb\u901f\u6362\u578b Chuck \u7529\u5e72\u5934<\/strong><\/p>\n

\u6309\u6676\u5706\u89c4\u683c\u5feb\u901f\u66f4\u6362\u7529\u5e72\u5934\uff0c2~12 \u82f1\u5bf8\u517c\u5bb9\uff0c\u6362\u578b\u65f6\u95f4\u77ed\uff0c\u63d0\u5347\u4ea7\u7ebf\u6548\u7387\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

EFEM\u4e13\u7528\u6e05\u6d17\u7529\u5e72\u673a\uff08SG-8-12-2D\uff09\uff0c\u4e13\u4e3a\u8bbe\u5907\u524d\u7aef\u6a21\u5757EFEM\u96c6\u6210\u914d\u5957\uff0c\u652f\u6301\u6676\u5706\u81ea\u52a8\u4e0a\u4e0b\u6599\u4e0eSECS-GEM\u901a\u4fe1\uff0c2~12\u82f1\u5bf8\u6676\u5706\u9ad8\u901f\u79bb\u5fc3\u7529\u5e72+\u53cc\u9762\u6c2e\u6c14\u70d8\u5e72\u3002<\/p>\n","protected":false},"featured_media":0,"template":"","meta":{"_zk_img":"\/assets\/products\/12qxj.png","_zk_specs":"\u96c6\u6210\u65b9\u5f0f<\/th>\u4e0eEFEM\u8bbe\u5907\u524d\u7aef\u6a21\u5757\u6807\u51c6\u5bf9\u63a5\uff0c\u652f\u6301\u6676\u5706\u81ea\u52a8\u4e0a\u4e0b\u6599<\/td><\/tr>\u901a\u4fe1\u534f\u8bae<\/th>SECS-GEM \/ SMEMA\uff08\u53ef\u5b9a\u5236\uff09\uff0c\u652f\u6301\u4e0a\u4f4d\u673a\u8054\u673a\u4e0eMES\u63a5\u5165<\/td><\/tr>\u52a0\u5de5\u7845\u7247\u5c3a\u5bf8<\/th>6 ~ 12 \u82f1\u5bf8\u5706\u7247\uff08\u4e0d\u540c\u5c3a\u5bf8\u66f4\u6362\u5bf9\u5e94 Chuck\uff09<\/td><\/tr>\u5355\u6b21\u5904\u7406\u6570\u91cf<\/th>1 \u7247<\/td><\/tr>\u5de5\u4f4d\u6570\u91cf<\/th>1 \u4e2a<\/td><\/tr>\u65cb\u8f6c\u901f\u5ea6<\/th>\u7a7a\u8f7d  10 ~ 4000 R\/Min\uff08\u4f3a\u670d\u7535\u673a\u9a71\u52a8\uff09<\/td><\/tr>\u7529\u5e72\u65b9\u5f0f<\/th>\u79bb\u5fc3\u7529\u5e72  + \u53cc\u9762\u6c2e\u6c14\u5439\u6c14<\/td><\/tr>\u5439\u6c14\u529f\u80fd<\/th>2 \u9762\uff08\u6b63\u9762 \/ \u53cd\u9762\uff09\u72ec\u7acb\u63a7\u5236<\/td><\/tr>\u6c2e\u6c14\u6d41\u91cf\u63a7\u5236<\/th>2 \u8def\uff08\u6b63\u53cd\u4e24\u9762\u5206\u522b\u63a7\u5236\uff09<\/td><\/tr>\u6e05\u6d17\u7529\u5e72\u65f6\u95f4<\/th>90s ~ 120s \u5f7b\u5e95\u5e72\u71e5\uff08\u5f00\u542f\u5439\u6c14\u529f\u80fd\uff09<\/td><\/tr>\u6c2e\u6c14\u538b\u529b<\/th>0.35 ~ 0.4 MPa\uff08\u63a5\u53e3 \u03c66mm\uff09<\/td><\/tr>CDA \u538b\u529b<\/th>0.35 ~ 0.4 MPa\uff08\u63a5\u53e3 \u03c66mm\uff09<\/td><\/tr>\u6392\u6c34\u7ba1\u63a5\u53e3<\/th>\u03c612mm \u5361\u5957\u63a5\u5934<\/td><\/tr>\u663e\u793a  \/ \u63a7\u5236\u7cfb\u7edf<\/th>7 \u5bf8\u89e6\u6478\u5c4f + PLC \u53ef\u7f16\u7a0b\u63a7\u5236\u5668<\/td><\/tr>\u6321\u6c34\u73af\u5347\u964d<\/th>\u652f\u6301\uff08 PP \/ PE \u6750\u8d28\uff09<\/td><\/tr>\u56fa\u5b9a\u4f4d\u7f6e\u505c\u6b62<\/th>\u652f\u6301<\/td><\/tr>\u7a7a\u7247\u68c0\u6d4b<\/th>\u652f\u6301\uff08\u8d85\u58f0\u6ce2\u4f4d\u7f6e\u68c0\u6d4b\uff09<\/td><\/tr>\u5916\u63a7\u542f\u52a8  \/ \u4e0a\u4f4d\u673a\u901a\u4fe1<\/th>\u652f\u6301<\/td><\/tr>\u7ba1\u8def\u6750\u8d28<\/th>PFA \u5168\u6c1f\u70f7\u6c27\u57fa\u6811\u8102<\/td><\/tr>\u7535\u6e90<\/th>220V AC<\/td><\/tr>\u6574\u673a\u529f\u7387<\/th>1.5 KW<\/td><\/tr>\u5916\u5f62\u5c3a\u5bf8  (\u6df1\u00d7\u5bbd\u00d7\u9ad8)<\/th>450 \u00d7 490 \u00d7 660 mm<\/td><\/tr>\u6676\u5706\u517c\u5bb9\u8303\u56f4<\/th>2~12 \u82f1\u5bf8\uff08\u5feb\u901f\u66f4\u6362 Chuck\uff09<\/td><\/tr>\u6574\u673a\u5360\u5730  (\u6df1\u00d7\u5bbd)<\/th>450 \u00d7 490 mm\uff08\u7d27\u51d1\u578b\u8bbe\u8ba1\uff09<\/td><\/tr>","_zk_keywords":"EFEM\u4e13\u7528\u6e05\u6d17\u673a,EFEM\u4e13\u7528\u6e05\u6d17\u7529\u5e72\u673a,EFEM\u6e05\u6d17\u7529\u5e72\u673a,EFEM\u7529\u5e72\u673a,\u8bbe\u5907\u524d\u7aef\u6a21\u5757\u6e05\u6d17\u7529\u5e72\u673a,\u6676\u5706\u6e05\u6d17\u7529\u5e72\u673a,SG-8-12-2D","_zk_en_title":"EFEM Cleaner & Spin Dryer","_zk_en_content":"

01 Product Overview<\/strong><\/p>

----<\/p>

SG-8-12-2D EFEM cleaner & spin dryer is a high-cleanliness wafer cleaning and drying machine designed for integration with the Equipment Front End Module (EFEM), combining high-speed centrifugal drying with double-side N2 hot-air drying - high efficiency, wide compatibility and low cost. With quick Chuck change, it covers cleaning & drying of 2-12 inch semiconductor wafers, masks and various substrates; it can be used as a standalone station or directly embedded into the EFEM to connect seamlessly with the wafer transfer robot and load ports for full automation.<\/p>

Product Name:<\/strong> EFEM Cleaner & Spin Dryer<\/p>

Model:<\/strong> SG-8-12-2D<\/p>

Application:<\/strong> EFEM equipment front end module - semiconductor wafers - masks - substrates cleaning & drying<\/p>

Core Features:<\/strong> EFEM integration - high-speed drying - double-side blow drying - quick changeover - high cleanliness<\/p>

01 EFEM Adaptation<\/strong><\/p>

----<\/p>

Seamless integration with EFEM<\/strong><\/p>

Standard mechanical and electrical interfaces connect directly to EFEM load ports and transfer robots, supporting automatic wafer loading\/unloading for automated front- and back-end lines.<\/p>

SECS-GEM \/ SMEMA communication (customizable)<\/strong><\/p>

Host PC control, integration with EFEM management and MES systems for remote recipe setting, status monitoring and data traceability.<\/p>

Compact integrated design<\/strong><\/p>

Overall dimensions 450 x 490 x 660mm - small footprint, adapted to EFEM integration space for easy line layout and automation retrofit.<\/p>

External start \/ host communication<\/strong><\/p>

External signal start and host communication enable timing linkage with EFEM robots for automated production rhythm.<\/p>

02 Structure & Features<\/strong><\/p>

----<\/p>

Imported PP housing<\/strong><\/p>

Imported polypropylene sheet - corrosion-resistant, low particle shedding, fully meets cleanroom requirements.<\/p>

Dedicated servo drive<\/strong><\/p>

Speed 10-4000 RPM infinitely adjustable: uniform cleaning at low speed, strong centrifugal drying at high speed - two functions in one.<\/p>

Industrial PLC + 7 inch touch screen<\/strong><\/p>

Stable industrial control with intuitive HMI; process parameters set with one click.<\/p>

PFA piping system<\/strong><\/p>

DIW and N2 lines in PFA perfluoro material - chemical resistant, low metal leaching, ensuring a high-cleanliness process environment.<\/p>

Double-side N2 blow drying<\/strong><\/p>

Independent N2 flow control on front and back sides; complete drying in 90-120 seconds, water-mark and particle free.<\/p>

Quick-change Chuck<\/strong><\/p>

Fast spin-head change by wafer size, 2-12 inch compatible, short changeover time, higher line efficiency.<\/p>","_zk_en_specs":"Integration<\/th>Standard EFEM front-end module docking, automatic wafer loading\/unloading<\/td><\/tr>Communication<\/th>SECS-GEM \/ SMEMA (customizable), host & MES integration<\/td><\/tr>Wafer Size<\/th>6-12 inch round wafers (change Chuck per size)<\/td><\/tr>Wafers per Cycle<\/th>1<\/td><\/tr>Stations<\/th>1<\/td><\/tr>Rotation Speed<\/th>No-load 10-4000 R\/Min (servo driven)<\/td><\/tr>Drying Method<\/th>Centrifugal + double-side N2 blow<\/td><\/tr>Blow<\/th>2 sides (front\/rear) independently controlled<\/td><\/tr>N2 Flow Control<\/th>2 lines (front & rear separately)<\/td><\/tr>Cycle Time<\/th>90-120s complete drying (with blow)<\/td><\/tr>N2 Pressure<\/th>0.35-0.4 MPa (port phi6mm)<\/td><\/tr>CDA Pressure<\/th>0.35-0.4 MPa (port phi6mm)<\/td><\/tr>Drain Port<\/th>phi12mm ferrule fitting<\/td><\/tr>Display\/Control<\/th>7 inch touch screen + PLC<\/td><\/tr>Splash Ring Lift<\/th>Supported (PP\/PE)<\/td><\/tr>Fixed-Position Stop<\/th>Supported<\/td><\/tr>Empty-Wafer Detection<\/th>Supported (ultrasonic)<\/td><\/tr>External Start \/ Host Comm<\/th>Supported<\/td><\/tr>Piping<\/th>PFA<\/td><\/tr>Power<\/th>220V AC<\/td><\/tr>Power Rating<\/th>1.5KW<\/td><\/tr>Dimensions<\/th>450 x 490 x 660mm<\/td><\/tr>Wafer Range<\/th>2-12 inch (quick Chuck change)<\/td><\/tr>Footprint<\/th>450 x 490mm (compact)<\/td><\/tr>","_zk_en_keywords":"EFEM Cleaner,EFEM Cleaner Spin Dryer,EFEM Cleaning Dryer,EFEM Spin Dryer,EFEM Front-End Module Dryer,Wafer Cleaner Dryer,SG-8-12-2D","_zk_en_excerpt":"SG-8-12-2D EFEM cleaner & spin dryer, designed for integration with the Equipment Front End Module (EFEM), supporting automatic wafer loading\/unloading and SECS-GEM communication, high-speed centrifugal drying + double-side N2 hot-air drying for 2-12 inch wafers."},"product_cat":[5],"class_list":["post-14","product","type-product","status-publish","hentry","product_cat-5"],"_links":{"self":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/product\/14","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/product"}],"about":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/types\/product"}],"wp:attachment":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=14"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fproduct_cat&post=14"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}