{"id":16,"date":"2026-10-08T00:35:54","date_gmt":"2026-10-07T16:35:54","guid":{"rendered":"http:\/\/zkmsemi.com\/index.php\/product\/%e4%ba%8c%e6%b5%81%e4%bd%93%e6%99%b6%e5%9c%86%e6%b8%85%e6%b4%97%e6%9c%ba\/"},"modified":"2026-10-11T21:39:10","modified_gmt":"2026-10-11T13:39:10","slug":"erliuti","status":"publish","type":"product","link":"https:\/\/zkmsemi.com\/?product=erliuti","title":{"rendered":"\u4e8c\u6d41\u4f53\u6676\u5706\u6e05\u6d17\u673a"},"content":{"rendered":"

1 \u3001\u8bbe\u5907\u6982\u51b5<\/strong><\/p>\n

1.1\u5e94\u7528\u9886\u57df\uff1a\u534a\u81ea\u52a8\u5355\u7247\u6e05\u6d17\u673a\u662f\u9ad8\u6d01\u51c0\u5ea6\u6e05\u6d17\u8bbe\u5907, \u5177\u6709\u836f\u6db2\u6e05\u6d17\uff0c\u9ad8\u901f\u7529\u5e72\uff0c\u5feb\u901f\u70d8\u5e72\uff0c\u6548\u7387\u9ad8\u7684\u7279\u70b9\uff0c\u4e0d\u540c\u6676\u5706\u5c3a\u5bf8\uff0c\u53ef\u901a\u8fc7\u5feb\u901f\u66f4\u6362\u7529\u5e72\u5934\u6765\u5b9e\u73b0\u3002\u5176\u4e3b\u8981\u7528\u4e8e\u517c\u5bb94-12\u5bf8\u6676\u5706\u534a\u5bfc\u4f53\u6676\u5706\u3001\u63a9\u819c\u677f\u3001\u5404\u79cd\u57fa\u7247\u7b49\u6750\u6599\u7684\u5237\u6d17\u5e72\u71e5\u5de5\u827a\u3002\u5177\u6709\u6210\u672c\u4f4e\uff0c\u5feb\u901f\u5e94\u7528\u751f\u4ea7\u7b49\u4f18\u70b9\u3002<\/p>\n

1.2\u540d\u79f0\uff1a\u534a\u81ea\u52a8\u5355\u7247\u6e05\u6d17\u673a<\/p>\n

1.3\u578b\u53f7\uff1aSQX-150-5Y1D<\/p>\n

2 \u3001\u4e3b\u8981\u7ed3\u6784\u7279\u5f81<\/strong><\/p>\n

\u534a\u81ea\u52a8\u5355\u7247\u6e05\u6d17\u673a\u4e3b\u8981\u4f3a\u670d\u7535\u673a\uff0c\u4f9b\u836f\u7cfb\u7edf\uff0cPLC\u63a7\u5236\u5668\uff0c\u9ad8\u6d01\u51c0\u9600\u95e8\uff0cPFA\u7ba1\u7b49\u90e8\u5206\u7ec4\u6210\u3002<\/p>\n

2.1\u6750\u8d28\uff1a\u8fdb\u53e3PP\u677f\uff0c\u80fd\u591f\u6ee1\u8db3\u6d01\u51c0\u5ba4\u5de5\u4f5c\u73af\u5883\u3002<\/p>\n

2.2\u4e13\u7528\u4f3a\u670d\u7535\u673a\uff0c\u53ef\u5b9e\u73b0\u6bcf\u5206\u949f5-5000\u8f6c\uff0c\u4f4e\u901f\u5747\u5300\u6e05\u6d17\uff0c\u9ad8\u901f\u79bb\u5fc3\u7529\u5e72\u3002<\/p>\n

2.3\u5de5\u4e1aPLC\u63a7\u5236\u5668\u548c\u4eba\u673a\u754c\u9762\uff0c\u7a33\u5b9a\u53ef\u9760\u63a7\u5236\u5404\u4e2a\u90e8\u4ef6\uff0c\u76f4\u89c2\u53ef\u89c6\u5316\u64cd\u4f5c\u6a21\u5f0f\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

\u4e3b\u8425\u4e8c\u6d41\u4f53\u6676\u5706\u6e05\u6d17\u673a\u3001\u63a9\u819c\u7248\u6e05\u6d17\u673a\u3001\u5149\u523b\u677f\u6e05\u6d17\u673a\u3001\u6676\u5706\u53bb\u80f6\u6e05\u6d17\u673a\uff0c\u9ad8\u538b\u6c14\u6db2\u55b7\u6dcb\u53bb\u9664\u7eb3\u7c73\u9897\u7c92\uff0c\u6e7f\u6cd5\u5316\u5b66\u5265\u79bb\u5149\u523b\u80f6\uff0c\u65e0\u635f\u6e05\u6d17\u5149\u7f69\u5149\u523b\u56fe\u5f62\uff0c\u9002\u914d 4-12 \u5bf8\u7845\u7247\u3001\u5316\u5408\u7269\u886c\u5e95\u3002<\/p>\n","protected":false},"featured_media":0,"template":"","meta":{"_zk_img":"\/assets\/products\/erliuti.png","_zk_specs":"\u52a0\u5de5\u5c3a\u5bf8<\/th>\u517c\u5bb9 2\u30013\u30014\u30016\u5bf8\u6676\u5706<\/td><\/tr>\u5355\u6b21\u7529\u5e72\u6570\u91cf<\/th>1 \u7247<\/td><\/tr>\u5de5 \u4f4d\u6570\u91cf \uff08\u4e2a\uff09<\/th>1<\/td><\/tr>\u673a\u53f0\u4e0a\u4e0b\u7247\u65b9\u5f0f<\/th>\u624b\u52a8\u4e0a\u4e0b\u7247<\/td><\/tr>\u65cb\u8f6c\u901f\u5ea6   RPM \/ MIN<\/th>5 - 5000rpm\u53ef\u8bbe\u5b9a<\/td><\/tr>\u6e05\u6d17\u65b9\u5f0f<\/th>\u836f\u6db2\u6e05\u6d17 \/\u5146\u58f0\u6e05\u6d17\/\u4e8c\u6d41\u4f53\u6e05\u6d17\/\u7eaf\u6c34\u6e05\u6d17<\/td><\/tr>\u836f\u6db2\u6570\u91cf<\/th>5\u79cd<\/td><\/tr>\u836f\u6db2\u55b7\u5634<\/th>\u4e0a\u4e0b\u4e24\u9762 \u72ec\u7acb\u4f9b\u6db2<\/td><\/tr>\u836f\u6db2\u69fd<\/th>5\u4e2a 10L PVDF\u836f\u6db2\u69fd<\/td><\/tr>\u9002\u7528\u836f\u6db2\u7c7b\u578b<\/th>\u51b7\u786b\u9178\u3001\u70ed\u786b\u9178\u3001 SC1\u3001\u9152\u7cbe\u3001\u4e19\u916e\u3001\u5f02\u4e19\u9187\u3001NMP\u3001\u6c22\u6c27\u5316\u94be<\/td><\/tr>\u836f\u6db2\u52a0\u70ed<\/th>1\u79cd\uff08\u70ed\u786b\u9178\uff09<\/td><\/tr>\u4f9b\u836f\u65b9\u5f0f<\/th>\u538b\u63a7\u6cd5<\/td><\/tr>\u51fa\u836f\u53e3\u5927\u5c0f<\/th>\u6b63\u9762 5\u8def\u5916\u5f844mm\u5185\u5f842mm \u80cc\u9762 5\u8def\u5916\u5f844mm\u5185\u5f842mm  <\/td><\/tr>\u836f\u6db2\u6d41\u91cf\u8c03\u8282<\/th>10\u8def PFA\u624b\u9600 10ml-1000ml\/min<\/td><\/tr>\u836f\u6db2\u6d41\u91cf\u76d1\u63a7<\/th>5\u8def\uff08\u6b63\u836f\u6db25\u8def\uff0c\u80cc\u836f\u6db25\u8def\uff09<\/td><\/tr>DIW\u6c34\u51b2\u6d17<\/th>2\u8def<\/td><\/tr>DI\u6c34\u6d41\u91cf\u8c03\u8282<\/th>2\u8def PFA\u624b\u9600 10ml-1000ml\/min<\/td><\/tr>DI\u6c34\u51fa\u53e3\u5927\u5c0f<\/th>2\u8def \u6b63\u80cc\u9762\u5916\u5f844mm\u5185\u5f842mm  <\/td><\/tr>\u6c34\u6d41\u91cf\u76d1\u63a7<\/th>2\u8def\uff08\u6b63\u6c341\u8def\uff0c\u80cc\u6c341\u8def\uff09 \uff09<\/td><\/tr>\u5146\u58f0\u6c34\u51b2\u6d17<\/th>1\u8def\u6b63\u9762<\/td><\/tr>\u5146\u751f\u6c34\u6d41\u91cf\u8c03\u8282<\/th>1\u8def PFA\u624b\u9600 100ml-2000ml\/min<\/td><\/tr>\u4e8c\u6d41\u4f53\u6e05\u6d17<\/th>1\u8def\u6b63\u9762<\/td><\/tr>\u4e8c\u6d41\u4f53\u6c34\u6d41\u91cf\u8c03\u8282<\/th>1\u8def PFA\u624b\u9600 100ml-2000ml\/min<\/td><\/tr>\u6e05\u6d17 \u7529\u5e72\u65f6\u95f4<\/th>2-5 min<\/td><\/tr>\u6c2e\u6c14\u538b\u529b<\/th>0.15Mpa \uff0c\u6c2e\u6c14\u7ba1\u63a5\u53e3 1\/4\u82f1\u5bf8<\/td><\/tr>\u7eaf\u6c34 \u538b\u529b<\/th>0.15Mpa \uff0c \u7ba1\u63a5\u53e3 1\/4mm<\/td><\/tr>\u6392\u6c34\u7ba1<\/th>2\u8def\u03c619mm\uff08\u6c34 \u836f\u6db2\uff09<\/td><\/tr>\u6392\u98ce\u7ba1<\/th>\u4e24\u8def 110mm\/75mm<\/td><\/tr>\u663e\u793a \/ \u63a7\u5236\u7cfb\u7edf<\/th>7 \u5bf8\u89e6\u6478\u5c4f + PLC\u53ef\u7f16\u7a0b\u63a7\u5236\u5668<\/td><\/tr>\u7ba1\u8def\u6750\u6599<\/th>PFA<\/td><\/tr>\u7535\u6e90<\/th>220V<\/td><\/tr>\u6574\u673a\u529f\u7387<\/th>5KW<\/td><\/tr>\u5916\u578b\u5c3a\u5bf8\uff08\u6df1 *\u5bbd*\u9ad8\uff09mm<\/th>\u957f 660mm*\u5bbd760mm*\u9ad81332mm<\/td><\/tr>","_zk_keywords":"\u4e8c\u6d41\u4f53\u6676\u5706\u6e05\u6d17\u673a \u00b7 \u63a9\u819c\u7248\u6e05\u6d17\u673a \u00b7 \u5149\u523b\u677f\u6e05\u6d17\u673a \u00b7 \u6676\u5706\u53bb\u80f6\u6e05\u6d17\u673a \u00b7 \u5149\u7f69\u6e05\u6d17\u673a","_zk_en_title":"Two-Fluid Wafer Cleaning Machine","_zk_en_content":"

1. Overview<\/strong><\/p>

1.1 Application: the semi-automatic single-wafer cleaner is high-cleanliness cleaning equipment with chemical cleaning, high-speed spin drying and fast baking. Different wafer sizes are handled by quick spin-head replacement. Mainly for brushing and drying of 4-12 inch semiconductor wafers, masks and various substrates - cost-effective and production-ready.<\/p>

1.2 Name: Semi-Automatic Single-Wafer Cleaner<\/p>

1.3 Model: SQX-150-5Y1D<\/p>

2. Main Structure<\/strong><\/p>

Mainly consists of servo motor, chemical supply system, PLC controller, high-cleanliness valves and PFA tubing.<\/p>

2.1 Material: imported PP sheet, cleanroom compatible.<\/p>

2.2 Dedicated servo motor: 5-5000 RPM, low-speed uniform cleaning, high-speed centrifugal drying.<\/p>

2.3 Industrial PLC controller with HMI for stable control and intuitive operation.<\/p>","_zk_en_specs":"Wafer Size<\/th>2, 3, 4, 6 inch wafers<\/td><\/tr>Wafers per Cycle<\/th>1<\/td><\/tr>Stations<\/th>1<\/td><\/tr>Loading<\/th>Manual<\/td><\/tr>Rotation Speed RPM\/MIN<\/th>5-5000 rpm settable<\/td><\/tr>Cleaning<\/th>Chemical \/ megasonic \/ two-fluid \/ DIW<\/td><\/tr>Chemical Types<\/th>5<\/td><\/tr>Nozzles<\/th>Independent top & bottom supply<\/td><\/tr>Chemical Tanks<\/th>5 x 10L PVDF<\/td><\/tr>Chemicals Supported<\/th>Cold sulfuric, hot sulfuric, SC1, alcohol, acetone, IPA, NMP, KOH<\/td><\/tr>Chemical Heating<\/th>1 (hot sulfuric)<\/td><\/tr>Supply Method<\/th>Pressure control<\/td><\/tr>Outlet Size<\/th>Front 5 x OD4mm\/ID2mm, Back 5 x OD4mm\/ID2mm<\/td><\/tr>Chemical Flow Control<\/th>10 x PFA manual valve 10-1000ml\/min<\/td><\/tr>Chemical Flow Monitoring<\/th>5 front + 5 back<\/td><\/tr>DIW Rinse<\/th>2 lines<\/td><\/tr>DIW Flow Control<\/th>2 x PFA manual valve 10-1000ml\/min<\/td><\/tr>DIW Outlet<\/th>2 x OD4mm\/ID2mm front & back<\/td><\/tr>Water Flow Monitoring<\/th>1 front + 1 back<\/td><\/tr>Megasonic Rinse<\/th>1 front<\/td><\/tr>Megasonic Flow Control<\/th>1 x PFA manual valve 100-2000ml\/min<\/td><\/tr>Two-Fluid Cleaning<\/th>1 front<\/td><\/tr>Two-Fluid Flow Control<\/th>1 x PFA manual valve 100-2000ml\/min<\/td><\/tr>Cycle Time<\/th>2-5 min<\/td><\/tr>N2 Pressure<\/th>0.15MPa, port 1\/4 inch<\/td><\/tr>DIW Pressure<\/th>0.15MPa, port 1\/4 inch<\/td><\/tr>Drain<\/th>2 x phi19mm (water\/chemical)<\/td><\/tr>Exhaust<\/th>2 x 110mm\/75mm<\/td><\/tr>Display\/Control<\/th>7 inch touch screen + PLC<\/td><\/tr>Piping<\/th>PFA<\/td><\/tr>Power<\/th>220V<\/td><\/tr>Power Rating<\/th>5KW<\/td><\/tr>Dimensions<\/th>L660 x W760 x H1332mm<\/td><\/tr>","_zk_en_keywords":"Two-Fluid Wafer Cleaner,Reticle Cleaner,Photomask Cleaner,Wafer Resist Removal Cleaner,Wafer Cleaning Machine","_zk_en_excerpt":"Two-fluid wafer cleaning machine, reticle cleaner, photomask cleaner and wafer resist-removal cleaner: high-pressure gas-liquid spray removes nano particles, wet chemical stripping of photoresist, non-destructive cleaning of masks and patterns, for 4-12 inch wafers and compound substrates."},"product_cat":[4],"class_list":["post-16","product","type-product","status-publish","hentry","product_cat-4"],"_links":{"self":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/product\/16","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/product"}],"about":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/types\/product"}],"wp:attachment":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fproduct_cat&post=16"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}