{"id":19,"date":"2026-10-08T00:35:56","date_gmt":"2026-10-07T16:35:56","guid":{"rendered":"http:\/\/zkmsemi.com\/index.php\/product\/%e6%99%b6%e5%9c%86%e7%94%a9%e5%b9%b2%e6%9c%ba%ef%bc%886-8%e5%af%b8%ef%bc%89\/"},"modified":"2026-10-11T21:39:00","modified_gmt":"2026-10-11T13:39:00","slug":"sqsgj","status":"publish","type":"product","link":"https:\/\/zkmsemi.com\/?product=sqsgj","title":{"rendered":"\u6676\u5706\u7529\u5e72\u673a\uff086\/8\u5bf8\uff09"},"content":{"rendered":"

\u4e00\u3001\u8bbe\u5907\u6982\u51b5<\/strong><\/p>\n

1.1\u5e94\u7528\u9886\u57df\uff1a\u6676\u5706\u7529\u5e72\u673a\u5e7f\u6cdb\u5e94\u7528\u4e8e\u534a\u5bfc\u4f53\u5236\u9020\u4e1a\uff0c\u5c24\u5176\u662f\u5728\u6676\u5706\u6e05\u6d17\u3001\u5149\u523b\u3001\u8680\u523b\u7b49\u5de5\u827a\u6b65\u9aa4\u4e2d\u3002\u5b83\u662f\u6676\u5706\u751f\u4ea7\u7ebf\u4e2d\u7684\u91cd\u8981\u8bbe\u5907\uff0c\u5bf9\u63d0\u9ad8\u6676\u5706\u751f\u4ea7\u8d28\u91cf\u548c\u6548\u7387\u5177\u6709\u91cd\u8981\u610f\u4e49\u3002\u901a\u8fc7\u6676\u5706\u7529\u5e72\u673a\u7684\u4f7f\u7528\uff0c\u53ef\u4ee5\u786e\u4fdd\u6676\u5706\u8868\u9762\u6d01\u51c0\u65e0\u6b8b\u7559\uff0c\u4e3a\u540e\u7eed\u5de5\u827a\u63d0\u4f9b\u4f18\u8d28\u7684\u57fa\u6750\u3002<\/p>\n

\u6676\u5706\u7529\u5e72\u673a\u7684\u4e3b\u8981\u529f\u80fd\u662f\u901a\u8fc7\u79bb\u5fc3\u529b\u5c06\u6676\u5706\u8868\u9762\u6b8b\u7559\u7684\u6e05\u6d17\u6db2\u548c\u5176\u4ed6\u6742\u8d28\u7529\u5e72\uff0c\u4ece\u800c\u4f7f\u6676\u5706\u8868\u9762\u5e72\u71e5\u6d01\u51c0\u3002\u8fd9\u4e2a\u8fc7\u7a0b\u5bf9\u4e8e\u540e\u7eed\u5de5\u827a\u7684\u987a\u5229\u8fdb\u884c\u81f3\u5173\u91cd\u8981\uff0c\u56e0\u4e3a\u4efb\u4f55\u6b8b\u7559\u7684\u6db2\u4f53\u6216\u6c61\u67d3\u7269\u90fd\u4f1a\u5f71\u54cd\u6676\u5706\u7684\u8d28\u91cf\u548c\u751f\u4ea7\u6548\u7387\u3002<\/p>\n

1.2\u540d\u79f0\uff1a\u6676\u5706\u7529\u5e72\u673a<\/p>\n

1.3\u578b\u53f7\uff1aCSM880S<\/p>\n

1.4\u5c3a\u5bf8\uff1a710mm*520mm*1850mm  <\/p>\n

1.5\u6676\u5706\u89c4\u683c\uff1a2-8 \u82f1\u5bf8<\/p>\n

\u4e8c\u3001\u4e3b\u8981\u7ed3\u6784\u7279\u5f81<\/strong><\/p>\n

2.1 \u7ed3\u6784\u7279\u5f81<\/strong><\/p>\n

\u6676\u5706\u7529\u5e72\u673a\u4e3b\u8981\u7531\u4e3b\u8f74\u4f20\u52a8\u90e8\u5206\uff0c\u7247\u76d2\u5939\u5177\uff0c\u5de5\u4f5c\u8154\uff0c\u673a\u67b6\uff0c\u95e8\u76d6\u90e8\u5206\uff0c\u6d01\u51c0\u7ba1\u8def\u90e8\u5206\uff0c\u7535\u6c14\u63a7\u5236\u7b49\u7ec4\u6210\u3002<\/p>\n

\u25aa \u6750\u8d28\uff1a\u4e0d\u9508\u94a2\u673a\u67b6+10mm PP\u677f\u5916\u58f3<\/p>\n

\u25aa \u8bbe\u5907\u673a\u67b6\uff1aSUS304\u4e0d\u9508\u94a2\u6750\u6599\uff0c\u80fd\u591f\u6ee1\u8db3\u6d01\u51c0\u5ba4\u5de5\u4f5c\u73af\u5883\u3002<\/p>\n

\u25aa \u8154\u4f53\u548c\u8f7d\u4f53\u91c7\u7528\u8010\u8150\u8680SUS316L\u4e0d\u9508\u94a2\u5e76\u7535\u5316\u5b66\u629b\u5149\u3002\u7247\u67b6\u8f7d\u4f53\u53ef\u65b9\u4fbf\u66f4\u6362\u3002<\/p>\n

\u25aa \u7535\u673a\u53ca\u8f6c\u5b50\u7ecf\u7cbe\u5bc6\u7684\u52a8\u5e73\u8861\u5904\u7406\uff0c\u51cf\u5c11\u8bbe\u5907\u5171\u632f\u3002<\/p>\n

\u25aa \u91c7\u7528\u4e13\u7528\u5b9a\u5236\u65e0\u5237\u7535\u673a\u53ca\u63a7\u5236\u5668\uff0c\u4fdd\u8bc1\u8bbe\u5907\u7684\u7a33\u5b9a\u3001\u53ef\u9760\u53ca\u6ee1\u8db3\u7cfb\u7edf\u5bf9\u6d01\u51c0\u5ea6\u5904\u7406\u7684\u8981\u6c42\u3002<\/p>\n

\u25aa \u7ba1\u8def\u7cfb\u7edf\uff1aPFA\u6d01\u51c0\u7ba1\u8def<\/p>\n

2.2\u5de5\u827a\u8154\u4f53\u53ca\u8f7d\u4f53<\/strong><\/p>\n

\u25aa \u5de5\u827a\u8154\u6570\u91cf\u22362\u4e2a \u6750\u8d28\u4e3a\u4e0d\u9508\u94a2316L\uff08\u8154\u4f53\u7535\u89e3\u629b\u5149\u5904\u7406\uff09<\/p>\n

\u25aa \u89c4\u683c\u2236 \u52a0\u5de5\u5c3a\u5bf8 2-8 \u82f1\u5bf8\u5168\u9ad8\u7247\u76d2\uff0c\u53ef\u517c\u5bb9\u3002<\/p>\n

\u25aa \u5de5\u4f5c\u8f6c\u901f\u2236 200\u20142200 RPM\/MIN<\/p>\n

\u25aa \u52a0\u70ed\u529f\u80fd\u2236 \u6c2e\u6c14\u52a0\u70ed  \u8154\u4f53\u52a0\u70ed<\/p>\n

\u25aa \u8f74\u5c01\uff1a\u7535\u673a\u8f6c\u8f74\u91c7\u7528\u6c2e\u6c14\u8f74\u5c01\u3002<\/p>\n

2.3<\/strong> \u7eaf\u6c34\u63a7\u5236\u5355\u5143\uff1a<\/strong><\/p>\n

\u25aa \u91c7\u7528\u6247\u5f62\u51b2\u6d17\u55b7\u5634\u3002<\/p>\n

\u25aa \u6392\u6c34\u53e3\u5b89\u88c5\u7535\u963b\u7387\u63a2\u5934\uff0c\u5bf9\u8154\u4f53\u6392\u6c34\u6c34\u8d28\u8fdb\u884c\u76d1\u6d4b\u3002<\/p>\n

\u25aa \u51b2\u6d17\u5de5\u827a\u5b8c\u6210\u540e\uff0c\u6c2e\u6c14\u5c06\u6b8b\u7559\u5728\u51b2\u6d17\u7ba1\u8def\u5185\u7684\u53bb\u79bb\u5b50\u6c34\u5439\u51c0\u3002<\/p>\n

\u25aa \u5f85\u673a\u65f6\uff0c\u4fdd\u6301\u56de\u6c34\u76d2\u5185\u6709\u6c34\u6d41\u5165\u4e14\u6d41\u91cf\u53ef\u8c03\u3002<\/p>\n

2.4<\/strong>  \u6c2e\u6c14\u63a7\u5236\u5355\u5143\uff1a<\/strong><\/p>\n

\u25aa \u7ba1\u4ef6\u9600\u95e8\uff1a SMC\u7535\u78c1\u9600\u3001 PFA\u9ad8\u7eaf\u7ba1\u4ef6\u3001 PTFE\u6c14\u63a7\u9600\u95e8\u3002<\/p>\n

\u25aa \u6c2e\u6c14\u52a0\u70ed\u529f\u80fd\uff1a 316\u4e0d\u9508\u94a2\u52a0\u70ed\u5668\u5728\u7ebf\u52a0\u70ed\uff0c\u6e29\u5ea6\u5f00\u5173\u63a7\u5236\uff0c \u52a0\u70ed\u6e29\u5ea6\u63a7\u5236\u5728 80\u2103\u3002<\/p>\n

\u25aa \u914d\u7f6e\u9ad8\u6d01\u51c0\u578b\u51cf\u538b\u9600\uff0c\u5185\u7f6e\u6c2e\u6c14\u8fc7\u6ee4\u5668\uff0c\u8fc7\u6ee4\u7cbe\u5ea6 0.003\u03bcm\u3002<\/p>\n

2.5<\/strong> \u9632\u9759\u7535\u63a7\u5236\u5355\u5143\uff1a<\/strong><\/p>\n

\u25aa \u7531\u9ad8\u538b\u53d1\u751f\u5668\u3001\u6c2e\u6c14\u7535\u79bb\u5ba4\u53ca\u6c2e\u6c14\u63a7\u5236\u901a\u9053\u7ec4\u6210\u3002<\/p>\n

\u25aa \u5f53\u6c2e\u6c14\u901a\u8fc7\u9ad8\u538b\u53d1\u751f\u5668\u7684\u63a7\u5236\u533a\u65f6\uff0c\u6c2e\u6c14\u7535\u79bb\u5145\u65a5\u6574\u4e2a\u5de5\u827a\u8154\u4f53\uff0c\u5f62\u6210\u4e2d\u548c\u5e73\u8861\u6d88\u9664\u9759\u7535\u3002<\/p>\n

2.6\u9897\u7c92\u5ea6\uff1a<\/strong><\/p>\n

\u25aa \u9897\u7c92\u589e\u52a0\u503c\uff1a\u9700\u4e0e\u5ba2\u6237\u786e\u8ba4<\/p>\n

2.7\u7535\u63a7\u5355\u5143\u53ca\u8f6f\u4ef6\u7cfb\u7edf\uff1a<\/strong><\/p>\n

\u25aa \u7529\u5e72\u5de5\u827a\u8fc7\u7a0b\u7531 PLC \u63a7\u5236\u5668+\u89e6\u6478\u5c4f\u63a7\u5236\uff0c\u53ef\u9009\u62e9\u8bbe\u7f6e\u591a\u79cd\u7528\u6237\u5de5\u827a\u83dc\u5355\uff0c\u5e76\u5bf9\u6bcf \u4e2a\u83dc\u5355\u7684\u5185\u5bb9\u5982\uff1a\u65f6\u95f4\u3001\u901f\u5ea6\u53c2\u6570\u8fdb\u884c\u8bbe\u7f6e\u3002<\/p>\n

\u25aa \u7cfb\u7edf\u8f6f\u4ef6\u8fd8\u5177\u6709\u5bc6\u7801\u6743\u9650\u8bbe\u7f6e\uff0c\u6545\u969c\u663e\u793a\u53ca\u62a5\u8b66\u529f\u80fd\u3002\u8bbe\u5907\u51fa\u73b0\u6545\u969c\u65f6\uff0c\u7cfb\u7edf\u4f1a\u505c\u6b62\u5de5\u4f5c\u5e76\u663e\u793a\u9519\u8bef\u4fe1\u606f\u3001\u62a5\u8b66\u4ee5\u63d0\u793a\u66f4\u6539\u548c\u7ef4\u4fee\u3002<\/p>\n

2.8\u5de5\u827a\u6d41\u7a0b\uff1a<\/strong><\/p>\n

\u53bb\u79bb\u5b50\u6c34\u65cb\u8f6c\u51b2\u6d17\uff0b\u79bb\u5fc3\u7529\u5e72\u6c2e\u6c14\u70d8\u5e72<\/p>\n","protected":false},"excerpt":{"rendered":"

\u6676\u5706\u7529\u5e72\u673a\u662f\u9ad8\u6d01\u51c0\u5ea6\u51b2\u6d17\u7529\u5e72\u8bbe\u5907\uff0c\u5177\u6709\u9ad8\u6d01\u51c0\u51b2\u6d17\u3001\u9ad8\u901f\u7529\u5e72\u3001\u5feb\u901f\u70d8\u5e72\u3001\u6548\u7387\u9ad8\u7684\u7279\u70b9\uff0c\u4e0d\u540c\u6676\u5706\u5c3a\u5bf8\u53ef\u901a\u8fc7\u5feb\u901f\u66f4\u6362\u8f6c\u5b50\u6765\u5b9e\u73b0\uff0c\u662f\u6e7f\u6cd5\u6e05\u6d17\u5de5\u827a\u7684\u4e3b\u8981\u8bbe\u5907\u3002<\/p>\n","protected":false},"featured_media":0,"template":"","meta":{"_zk_img":"\/assets\/products\/sqsgj.png","_zk_specs":"\u65f6\u95f4<\/th>60s 30 s 200S 100S<\/td><\/tr>\u901f\u5ea6<\/th>8 00r\/min 10 00r\/min 18 00r\/min 15 00r\/min<\/td><\/tr>\u4ecb\u8d28<\/th>\u53bb\u79bb\u5b50\u6c34 \u6c2e\u6c14 \u6c2e\u6c14 \u6c2e\u6c14<\/td><\/tr>\u6c2e\u6c14\u6e29\u5ea6<\/th>\u65e0 0 \u00b0 80 \u00b0 80 \u00b0<\/td><\/tr>\u52a0\u5de5\u7845\u7247\u5c3a\u5bf8<\/th>2-8 \u82f1\u5bf8 \u5706\u7247<\/td><\/tr>\u5355\u6b21\u7529\u5e72\u6570\u91cf<\/th>50 \u7247<\/td><\/tr>\u5de5 \u4f4d\u6570\u91cf \uff08\u4e2a\uff09<\/th>2<\/td><\/tr>\u788e\u7247\u7387<\/th>\u2264 0.0 1 %<\/td><\/tr>\u9897\u7c92\u589e\u52a0\u503c<\/th>\u9700\u4e0e\u5ba2\u6237\u786e\u8ba4<\/td><\/tr>\u65cb\u8f6c\u901f\u5ea6   RPM \/ MIN<\/th>200 - 2200<\/td><\/tr>\u7529\u5e72\u65f6\u95f4<\/th>5- 8 min<\/td><\/tr>\u8154\u5ba4\u53ca\u6c2e\u6c14\u52a0\u70ed\u65b9\u5f0f<\/th>\u7535 \u52a0\u70ed\u5668<\/td><\/tr>\u6c2e\u6c14\u538b\u529b  <\/th>0.25-0.3Mpa \uff0c\u6c2e\u6c14\u7ba1\u63a5\u53e3 3\/8 \u201d<\/td><\/tr>\u6c2e\u6c14\u8017\u91cf L\/min<\/th>90-120<\/td><\/tr>\u7eaf\u6c34 \u538b\u529b<\/th>0.25-0.3Mpa \uff0c \u7ba1\u63a5\u53e3 3\/8 \u201d<\/td><\/tr>\u6392\u6c34\u7ba1<\/th>40mm \u5706 \u7ba1   PVC \u7ba1<\/td><\/tr>\u63a7\u5236\u7cfb\u7edf<\/th>\u4e09\u83f1 PLC \u53ef\u7f16\u7a0b\u63a7\u5236\u5668<\/td><\/tr>\u663e\u793a<\/th>4.3 \u5bf8\u89e6\u6478\u5c4f<\/td><\/tr>\u7535\u6e90<\/th>AC 220 V<\/td><\/tr>\u6574\u673a\u529f\u7387<\/th>6   KW<\/td><\/tr>\u5916\u578b\u5c3a\u5bf8 \uff08\u6df1 * \u5bbd * \u9ad8\uff09 mm<\/th>710mm*520mm*1850mm<\/td><\/tr>","_zk_keywords":"\u6676\u5706\u7529\u5e72\u673a \u00b7 6\u5bf8\u6676\u5706\u7529\u5e72\u673a \u00b7 8\u5bf8\u6676\u5706\u7529\u5e72\u673a \u00b7 \u7845\u7247\u7529\u5e72\u673a \u00b7 \u78b3\u5316\u7845\u6676\u5706\u7529\u5e72\u673a","_zk_en_title":"Wafer Spin Dryer (6\/8 inch)","_zk_en_content":"

1. Overview<\/strong><\/p>

1.1 Application: wafer spin dryers are widely used in semiconductor manufacturing, especially in cleaning, lithography and etching steps. As an important part of the wafer production line, they improve wafer quality and efficiency by ensuring a clean, residue-free surface for downstream processes.<\/p>

The main function of the wafer spin dryer is to remove residual cleaning liquid and impurities from the wafer surface by centrifugal force, leaving it dry and clean. This is critical for subsequent processes - any residual liquid or contamination affects wafer quality and production efficiency.<\/p>

1.2 Name: Wafer Spin Dryer<\/p>

1.3 Model: CSM880S<\/p>

1.4 Dimensions: 710 x 520 x 1850 mm<\/p>

1.5 Wafer Spec: 2-8 inch<\/p>

2. Main Structure<\/strong><\/p>

2.1 Structure<\/strong><\/p>

Mainly composed of spindle drive, cassette fixture, process chamber, frame, door, clean piping and electrical control.<\/p>

Material: stainless steel frame + 10mm PP housing<\/p>

Frame: SUS304 stainless steel, cleanroom compatible.<\/p>

Chamber & carrier in corrosion-resistant SUS316L stainless steel with electrochemical polishing. Carrier easily replaceable.<\/p>

Motor and rotor precisely dynamically balanced to reduce resonance.<\/p>

Custom brushless motor & controller for stability, reliability and cleanliness requirements.<\/p>

Piping: PFA clean tubing<\/p>

2.2 Process Chamber & Carrier<\/strong><\/p>

Process chambers: 2, SUS316L (electro-polished)<\/p>

Spec: full-height cassettes 2-8 inch, compatible<\/p>

Operating speed: 200-2200 RPM\/MIN<\/p>

Heating: N2 heating \/ chamber heating<\/p>

Shaft seal: N2 shaft seal for motor spindle<\/p>

2.3 DI Water Control Unit<\/strong><\/p>

Fan-type rinse nozzles.<\/p>

Resistivity probe on drain to monitor chamber water quality.<\/p>

After rinse, N2 purges DI water left in the rinse line.<\/p>

On standby, water flows into the return box with adjustable flow.<\/p>

2.4 Nitrogen Control Unit<\/strong><\/p>

Valves: SMC solenoid valves, PFA high-purity fittings, PTFE pneumatic valves.<\/p>

N2 heating: in-line 316SS heater, temp-switch control, 80 degree C.<\/p>

High-purity regulator with built-in N2 filter, 0.003um.<\/p>

2.5 Static Control Unit<\/strong><\/p>

High-voltage generator, N2 ionization chamber and N2 control channels.<\/p>

N2 ionizes through the process chamber, neutralizing static.<\/p>

2.6 Particle Level<\/strong><\/p>

Particle adders: to be confirmed with customer.<\/p>

2.7 Electrical Control & Software<\/strong><\/p>

Process controlled by PLC + touch screen; multiple user recipe menus, time\/speed settable per menu.<\/p>

Password permission, fault display and alarm. On fault the system stops, shows error and alarms for corrective action.<\/p>

2.8 Process Flow<\/strong><\/p>

DIW spin rinse + centrifugal dry + N2 baking<\/p>","_zk_en_specs":"Time<\/th>60s 30s 200s 100s<\/td><\/tr>Speed<\/th>800 \/ 1000 \/ 1800 \/ 1500 r\/min<\/td><\/tr>Medium<\/th>DIW N2 N2 N2<\/td><\/tr>N2 Temp<\/th>None 0 deg 80 deg 80 deg<\/td><\/tr>Wafer Size<\/th>2-8 inch round wafers<\/td><\/tr>Wafers per Cycle<\/th>50<\/td><\/tr>Stations<\/th>2<\/td><\/tr>Breakage Rate<\/th><= 0.01%<\/td><\/tr>Particle Adders<\/th>To be confirmed with customer<\/td><\/tr>Rotation Speed RPM\/MIN<\/th>200-2200<\/td><\/tr>Drying Time<\/th>5-8 min<\/td><\/tr>Chamber & N2 Heating<\/th>Electric heater<\/td><\/tr>N2 Pressure<\/th>0.25-0.3MPa, port 3\/8 inch<\/td><\/tr>N2 Consumption<\/th>90-120 L\/min<\/td><\/tr>DIW Pressure<\/th>0.25-0.3MPa, port 3\/8 inch<\/td><\/tr>Drain<\/th>40mm PVC pipe<\/td><\/tr>Control System<\/th>Mitsubishi PLC<\/td><\/tr>Display<\/th>4.3 inch touch screen<\/td><\/tr>Power<\/th>AC 220V<\/td><\/tr>Power Rating<\/th>6 KW<\/td><\/tr>Dimensions<\/th>710 x 520 x 1850 mm<\/td><\/tr>","_zk_en_keywords":"Wafer Spin Dryer,6 Inch Wafer Dryer,8 Inch Wafer Dryer,Silicon Wafer Dryer,SiC Wafer Dryer","_zk_en_excerpt":"Wafer spin dryer is high-cleanliness rinse & dry equipment with high-purity rinse, high-speed drying and fast baking; quick rotor change for different wafer sizes - a key wet-cleaning tool."},"product_cat":[5],"class_list":["post-19","product","type-product","status-publish","hentry","product_cat-5"],"_links":{"self":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/product\/19","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/product"}],"about":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/types\/product"}],"wp:attachment":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=19"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fproduct_cat&post=19"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}