{"id":20,"date":"2026-10-08T00:35:57","date_gmt":"2026-10-07T16:35:57","guid":{"rendered":"http:\/\/zkmsemi.com\/index.php\/product\/%e6%89%8b%e5%8a%a8%e5%8d%95%e7%89%87%e6%b8%85%e6%b4%97%e7%94%a9%e5%b9%b2%e6%9c%ba\/"},"modified":"2026-10-11T21:38:59","modified_gmt":"2026-10-11T13:38:59","slug":"sdqxj","status":"publish","type":"product","link":"https:\/\/zkmsemi.com\/?product=sdqxj","title":{"rendered":"\u624b\u52a8\u5355\u7247\u6e05\u6d17\u7529\u5e72\u673a"},"content":{"rendered":"<p><strong>1 \u3001\u8bbe\u5907\u6982\u51b5<\/strong><\/p>\n<p>1.1\u5e94\u7528\u9886\u57df\uff1a\u5355\u7247\u6e05\u6d17\u7529\u5e72\u673a\u662f\u9ad8\u6d01\u51c0\u5ea6\u6e05\u6d17\u7529\u5e72\u8bbe\u5907, \u5177\u6709\u9ad8\u901f\u7529\u5e72\uff0c\u5feb\u901f\u70d8\u5e72\uff0c\u6548\u7387\u9ad8\u7684\u7279\u70b9\uff0c\u4e0d\u540c\u6676\u5706\u5c3a\u5bf8\uff0c\u53ef\u901a\u8fc7\u5feb\u901f\u66f4\u6362\u7529\u5e72\u5934\u6765\u5b9e\u73b0\u3002\u5176\u4e3b\u8981\u7528\u4e8e\u517c\u5bb92-4\u5bf8\u6676\u5706\u534a\u5bfc\u4f53\u6676\u5706\u3001\u63a9\u819c\u677f\u3001\u5404\u79cd\u57fa\u7247\u7b49\u6750\u6599\u7684\u5237\u6d17\u5e72\u71e5\u5de5\u827a\u3002\u5177\u6709\u6210\u672c\u4f4e\uff0c\u5feb\u901f\u5e94\u7528\u751f\u4ea7\u7b49\u4f18\u70b9\u3002<\/p>\n<p>1.2\u540d\u79f0\uff1a\u5355\u7247\u6e05\u6d17\u7529\u5e72\u673a<\/p>\n<p>1.3\u578b\u53f7\uff1aQXG-300-2YDN<\/p>\n<p><strong>2 \u3001\u4e3b\u8981\u7ed3\u6784\u7279\u5f81<\/strong><\/p>\n<p>\u5355\u7247\u6e05\u6d17\u7529\u5e72\u673a\u4e3b\u8981\u4f3a\u670d\u7535\u673a\uff0cPLC\u63a7\u5236\u5668\uff0c\u4eba\u673a\u754c\u9762\uff0c\u9ad8\u6d01\u51c0\u9600\u95e8\uff0cPFA\u7ba1\uff0c\u6c2e\u6c14\u52a0\u70ed\u5668\uff0c\u9632\u8150\u8680\u8fdb\u53e3PP\u5916\u58f3\uff0c\u4ee5\u53ca\u7529\u5e72\u5934\u7b49\u90e8\u5206\u7ec4\u6210\u3002<\/p>\n<p>2.1\u6750\u8d28\uff1a\u8fdb\u53e3PP\u677f\uff0c\u80fd\u591f\u6ee1\u8db3\u6d01\u51c0\u5ba4\u5de5\u4f5c\u73af\u5883\u3002<\/p>\n<p>2.2\u4e13\u7528\u4f3a\u670d\u7535\u673a\uff0c\u53ef\u5b9e\u73b0\u6bcf\u5206\u949f10-5000\u8f6c\uff0c\u4f4e\u901f\u5747\u5300\u6e05\u6d17\uff0c\u9ad8\u901f\u79bb\u5fc3\u7529\u5e72\u3002<\/p>\n<p>2.3\u5de5\u4e1aPLC\u63a7\u5236\u5668\u548c\u4eba\u673a\u754c\u9762\uff0c\u7a33\u5b9a\u53ef\u9760\u63a7\u5236\u5404\u4e2a\u90e8\u4ef6\uff0c\u76f4\u89c2\u53ef\u89c6\u5316\u64cd\u4f5c\u6a21\u5f0f\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u5355\u7247\u6e05\u6d17\u7529\u5e72\u673a\u662f\u9ad8\u6d01\u51c0\u5ea6\u6e05\u6d17\u7529\u5e72\u8bbe\u5907\uff0c\u5177\u6709\u9ad8\u901f\u7529\u5e72\u3001\u5feb\u901f\u70d8\u5e72\u3001\u6548\u7387\u9ad8\u7684\u7279\u70b9\uff0c\u4e0d\u540c\u6676\u5706\u5c3a\u5bf8\u53ef\u901a\u8fc7\u5feb\u901f\u66f4\u6362\u7529\u5e72\u5934\u6765\u5b9e\u73b0\u3002\u4e3b\u8981\u7528\u4e8e\u517c\u5bb92-4\u5bf8\u534a\u5bfc\u4f53\u6676\u5706\u3001\u63a9\u819c\u677f\u3001\u5404\u79cd\u57fa\u7247\u7b49\u6750\u6599\u7684\u5237\u6d17\u5e72\u71e5\u5de5\u827a\u3002<\/p>\n","protected":false},"featured_media":0,"template":"","meta":{"_zk_img":"\/assets\/products\/sdqxj.png","_zk_specs":"<tr><th>\u52a0\u5de5\u5c3a\u5bf8<\/th><td>\u517c\u5bb9 2-4\u5bf8\u6676\u5706<\/td><\/tr><tr><th>\u5355\u6b21\u7529\u5e72\u6570\u91cf<\/th><td>1 \u7247<\/td><\/tr><tr><th>\u5de5 \u4f4d\u6570\u91cf \uff08\u4e2a\uff09<\/th><td>1<\/td><\/tr><tr><th>\u673a\u53f0\u4e0a\u4e0b\u7247\u65b9\u5f0f<\/th><td>\u624b\u52a8\u4e0a\u4e0b\u7247<\/td><\/tr><tr><th>\u65cb\u8f6c\u901f\u5ea6 &nbsp; 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Spin Dryer","_zk_en_content":"<p><strong>1. Overview<\/strong><\/p><p>1.1 Application: the single-wafer cleaner &amp; dryer is high-cleanliness cleaning and drying equipment with high-speed spin drying, fast baking and high efficiency. Different wafer sizes are handled by quick spin-head replacement. Mainly for brushing and drying of 2-4 inch semiconductor wafers, masks and various substrates - cost-effective and production-ready.<\/p><p>1.2 Name: Single-Wafer Cleaner &amp; Spin Dryer<\/p><p>1.3 Model: QXG-300-2YDN<\/p><p><strong>2. Main Structure<\/strong><\/p><p>Mainly consists of servo motor, PLC controller, HMI, high-cleanliness valves, PFA tubing, nitrogen heater, corrosion-resistant imported PP housing and spin head.<\/p><p>2.1 Material: imported PP sheet, cleanroom compatible.<\/p><p>2.2 Dedicated servo motor: 10-5000 RPM, low-speed uniform cleaning, high-speed centrifugal drying.<\/p><p>2.3 Industrial PLC controller with HMI for stable control and intuitive operation.<\/p>","_zk_en_specs":"<tr><th>Wafer Size<\/th><td>2-4 inch wafers<\/td><\/tr><tr><th>Wafers per Cycle<\/th><td>1<\/td><\/tr><tr><th>Stations<\/th><td>1<\/td><\/tr><tr><th>Loading<\/th><td>Manual<\/td><\/tr><tr><th>Rotation Speed RPM\/MIN<\/th><td>10-5000 rpm settable, accuracy &lt; 1rpm<\/td><\/tr><tr><th>Cleaning<\/th><td>Double-side chemical \/ megasonic (optional) \/ N2 dry<\/td><\/tr><tr><th>Chemical Types<\/th><td>2<\/td><\/tr><tr><th>Nozzles<\/th><td>Independent supply top &amp; bottom<\/td><\/tr><tr><th>Chemical Tanks<\/th><td>2 x 10L PVDF<\/td><\/tr><tr><th>Chemical Supply<\/th><td>PVDF pump or pressure control valve<\/td><\/tr><tr><th>Chemical Flow Control<\/th><td>PFA manual valve 10-1000ml\/min<\/td><\/tr><tr><th>Chemical Flow Monitoring<\/th><td>Yes<\/td><\/tr><tr><th>DIW Rinse<\/th><td>Yes<\/td><\/tr><tr><th>DIW Flow Control<\/th><td>PFA manual valve 10-1000ml\/min<\/td><\/tr><tr><th>Megasonic Nozzle<\/th><td>Optional<\/td><\/tr><tr><th>N2 Blow<\/th><td>Yes, cone &amp; fan nozzles replaceable<\/td><\/tr><tr><th>Cycle Time<\/th><td>2-5 min<\/td><\/tr><tr><th>N2 Pressure<\/th><td>0.15MPa, N2 port 1\/4 inch<\/td><\/tr><tr><th>DIW Pressure<\/th><td>0.15MPa, port 3\/8 inch<\/td><\/tr><tr><th>Drain<\/th><td>2 x phi20mm (water\/chemical)<\/td><\/tr><tr><th>Display\/Control<\/th><td>7 inch touch screen + PLC<\/td><\/tr><tr><th>Piping<\/th><td>PFA<\/td><\/tr><tr><th>Power<\/th><td>220V<\/td><\/tr><tr><th>Power Rating<\/th><td>3KW<\/td><\/tr><tr><th>Dimensions<\/th><td>L660 x W760 x H1332 mm<\/td><\/tr>","_zk_en_keywords":"Manual Single-Wafer Cleaner Dryer,Single-Wafer Cleaning Machine,Wafer Double-Side Cleaner Dryer,Single-Wafer Wet Cleaner","_zk_en_excerpt":"Manual single-wafer cleaner &amp; dryer (QXG-300-2YDN) is a high-cleanliness cleaning &amp; drying tool with high-speed spin drying, fast baking and high efficiency, compatible with 2-4 inch wafers, masks and substrates."},"product_cat":[4],"class_list":["post-20","product","type-product","status-publish","hentry","product_cat-4"],"_links":{"self":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/product\/20","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/product"}],"about":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/types\/product"}],"wp:attachment":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=20"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fproduct_cat&post=20"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}