{"id":47,"date":"2026-10-08T17:33:46","date_gmt":"2026-10-08T09:33:46","guid":{"rendered":"http:\/\/zkmsemi.com\/?product=qsg"},"modified":"2026-10-11T21:38:41","modified_gmt":"2026-10-11T13:38:41","slug":"qsg","status":"publish","type":"product","link":"https:\/\/zkmsemi.com\/?product=qsg","title":{"rendered":"\u5355\u7247\u6676\u5706\u6e05\u6d17\u7529\u5e72\u673a\uff0812\u5bf8\/8\u5bf8\uff09"},"content":{"rendered":"

\u4e00\u3001\u8bbe\u5907\u6982\u51b5<\/strong><\/p>\n

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\u4e8c\u3001\u4e3b\u8981\u7ed3\u6784\u7279\u5f81<\/strong><\/p>\n

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1. Overview<\/strong><\/p>

The single-wafer spin dryer is high-cleanliness drying equipment featuring high-speed spin drying and fast baking. Different wafer sizes are handled by quick spin-head replacement. As a key tool in the wet-cleaning process, it is compact and stable, mainly for cleaning & drying of 2-8 inch semiconductor wafers, masks and various substrates - cost-effective and production-ready.<\/p>

2. Main Structure<\/strong><\/p>

The single-wafer cleaner & dryer mainly consists of servo motor, PLC controller, HMI, high-cleanliness valves, PFA tubing, nitrogen heater, corrosion-resistant housing and spin head.<\/p>

2.1 Material: imported PP sheet, suitable for cleanroom environment;
2.2 Dedicated servo motor: 10-5000 RPM, low-speed uniform cleaning and high-speed centrifugal drying;
2.3 Industrial PLC controller with HMI for stable, reliable control and intuitive operation;
2.4 Spin heads customizable for different wafer sizes.<\/p>","_zk_en_specs":"Equipment<\/th>Single-Wafer Cleaner & Spin Dryer<\/td><\/tr>Model<\/th>QSG-300<\/td><\/tr>Wafer Size<\/th>2-8 inch wafers, masks, various substrates<\/td><\/tr>Material<\/th>Imported PP sheet, cleanroom compatible<\/td><\/tr>Rotation Speed<\/th>10-5000 RPM (servo), low-speed clean \/ high-speed dry<\/td><\/tr>Control System<\/th>Industrial PLC + HMI<\/td><\/tr>Spin Head<\/th>Customizable for different sizes<\/td><\/tr>","_zk_en_keywords":"Single Wafer Cleaner Dryer,12 Inch Wafer Cleaner Dryer,8 Inch Wafer Cleaner Dryer,QSG-300","_zk_en_excerpt":"Single-wafer spin dryer (QSG-300) is a high-cleanliness drying tool with high-speed spin drying and fast baking; wafer sizes are changed by quick spin-head replacement. For 2-8 inch wafers, masks and substrates."},"product_cat":[5],"class_list":["post-47","product","type-product","status-publish","hentry","product_cat-5"],"_links":{"self":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/product\/47","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/product"}],"about":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=\/wp\/v2\/types\/product"}],"wp:attachment":[{"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=47"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/zkmsemi.com\/index.php?rest_route=%2Fwp%2Fv2%2Fproduct_cat&post=47"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}