Single-Wafer Spin Dryer
1.1 Application: single-wafer spin dryer is high-cleanliness cleaning and drying equipment with high-speed drying, fast baking and high efficiency. Different wafer sizes are handled by quick spin-head replacement. As a key tool of the wet-cleaning process, it is compact and stable, mainly for drying of 2-4 inch semiconductor wafers, masks and various substrates - cost-effective and production-ready.
1.2 Name: Single-Wafer Spin Dryer
1.3 Model: DP-4
1.4 Dimensions: L250 x W200 x H400mm
1.5 Wafer Spec: 2-4 inch
2. Main Structure
2.1 Mainly consists of motor, frequency converter, corrosion-resistant housing and spin head.
2.2 Material: imported PP sheet, cleanroom compatible.
2.3 Custom high-speed motor up to 6000 RPM for higher drying efficiency.
| Chuck Size | 2/3 inch |
|---|---|
| Speed | 0-5000 (different speeds for different sizes) |
| Direction | Forward / Reverse |
| Protection | Splash ring + lift cover |
| Run Time | 0-999.9s |
| Accel Time | 0-15s |
| Decel Time | 0-15s |
| Voltage | 220V |
| Power | 1.5KW |
| Voltage / Power | 220V / 1.5KW |
| Drain | phi6mm |
| Power Cord | 3-pin plug |
| Part | Name Qty Replace Freq |
| Spin Head | 6 / 5000 wafers |
| Spindle Motor | Shaft seal 1 / 1 year |
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