Multi-Function Clean Cleaning Station (FFU Purification Bench)
The multi-function clean cleaning station (FFU purification bench) integrates efficient purified air supply and cleaning functions, suitable for cleaning, inspection and purification operations in semiconductor wafer and optoelectronic device processes.
Features
1. FFU HEPA filtered purified air supply creates a clean operating zone;
2. Open chamber with ventilation design effectively exhausts process gases and dust;
3. Corrosion-resistant tabletop and piping for various cleaning processes;
4. Customizable cleaning stations and purification hoods - spray, piping and table size configurable per process.
Customized cleaning and purification workstations for laboratories and cleanrooms.
| Type | Multi-function clean cleaning station / FFU purification bench |
|---|---|
| Purified Air | FFU HEPA filtered supply for clean operating zone |
| Chamber | Open chamber with ventilation |
| Application | Cleaning, inspection & purification of wafers and optoelectronic devices |
| Customization | Custom cleaning stations, purification hoods, spray/piping/table size per process |
Need selection guidance or a customized solution? Talk to our engineers.
