InP Wafer Cleaning Machine (Semi-Auto Single-Wafer Cleaner)
1. Overview
1.1 Application: the semi-automatic single-wafer cleaner is high-cleanliness cleaning equipment with chemical cleaning, high-speed spin drying and fast baking. Different wafer sizes are handled by quick spin-head replacement. Mainly for brushing and drying of 4-12 inch semiconductor wafers, masks and various substrates - cost-effective and production-ready.
1.2 Name: InP Semi-Automatic Single-Wafer Cleaner
1.3 Model: SQX-150-5Y1D
2. Main Structure
Mainly consists of servo motor, chemical supply system, PLC controller, high-cleanliness valves and PFA tubing.
2.1 Material: imported PP sheet, cleanroom compatible.
2.2 Dedicated servo motor: 5-5000 RPM, low-speed uniform cleaning, high-speed centrifugal drying.
2.3 Industrial PLC controller with HMI for stable control and intuitive operation.
| Wafer Size | 2, 3, 4, 6 inch wafers |
|---|---|
| Wafers per Cycle | 1 |
| Stations | 1 |
| Loading | Manual |
| Rotation Speed RPM/MIN | 5-5000 rpm settable |
| Cleaning | Chemical / megasonic / DIW |
| Chemical Types | 5 |
| Nozzles | Independent top & bottom supply |
| Chemical Tanks | 5 x 10L PVDF |
| Chemicals Supported | Cold sulfuric, hot sulfuric, SC1, alcohol, acidic chemicals |
| Chemical Heating | 1 (hot sulfuric) |
| Supply Method | Pressure control |
| Outlet Size | Front 5 x OD4mm/ID2mm, Back 5 x OD4mm/ID2mm |
| Chemical Flow Control | 10 x PFA manual valve 10-1000ml/min |
| Chemical Flow Monitoring | 4 front + 4 back |
| DIW Rinse | 2 lines |
| DIW Flow Control | 2 x PFA manual valve 10-1000ml/min |
| DIW Outlet | 2 x OD4mm/ID2mm front & back |
| Water Flow Monitoring | 1 front + 1 back |
| Megasonic Rinse | 1 line |
| Megasonic Flow Control | 1 x PFA manual valve 10-1000ml/min |
| External | High-pressure water gun x 1 |
| Cycle Time | 2-5 min |
| N2 Pressure | 0.15MPa, port 1/4 inch |
| DIW Pressure | 0.3MPa, port 3/8 inch |
| Drain | 2 x phi19mm (water/chemical) |
| Exhaust | 2 x 110mm/75mm |
| Display/Control | 7 inch touch screen + PLC |
| External Communication | TCP interface collects equipment data: flow, temperature, speed, airflow |
| Piping | PFA |
| Power | 220V |
| Power Rating | 5KW |
| Dimensions | L660 x W760 x H1332mm |
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